Influence of surrounding gas type and pressure condition on micro-drilling of silicon carbide by harmonics of Nd:YAG laser

Yasuhiro Okamoto, Shin Urushibata, Akira Okada, Tomokazu Sakagawa, Shin Ichi Nakashiba

Research output: Contribution to conferencePaper

Abstract

Micro-drilling characteristics of silicon carbide by fundamental wavelength and three kinds of harmonic of Nd:YAG laser were experimentally investigated in the viewpoints of surrounding gas type and the pressure condition. Moreover, its characteristics were discussed by the observation of plasma behaviour, flow filed and debris behaviour on the specimen surface with a high-speed camera. The cracks were observed around drilled hole under the argon surrounding gas condition due to the generation of high intensity plasma. On the other hand, the helium surrounding gas kept the plasma in the vicinity region on the top surface of specimen, and the surrounding area of drilled hole was remarkably roughened. The better surface integrity could be obtained under the appropriate combination of surrounding gas type and the reduced pressure conditions.

Original languageEnglish
Pages1269-1276
Number of pages8
Publication statusPublished - Dec 1 2012
Event31st International Congress on Applications of Lasers and Electro-Optics, ICALEO 2012 - Anaheim, CA, United States
Duration: Sep 23 2012Sep 27 2012

Other

Other31st International Congress on Applications of Lasers and Electro-Optics, ICALEO 2012
CountryUnited States
CityAnaheim, CA
Period9/23/129/27/12

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

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    Okamoto, Y., Urushibata, S., Okada, A., Sakagawa, T., & Nakashiba, S. I. (2012). Influence of surrounding gas type and pressure condition on micro-drilling of silicon carbide by harmonics of Nd:YAG laser. 1269-1276. Paper presented at 31st International Congress on Applications of Lasers and Electro-Optics, ICALEO 2012, Anaheim, CA, United States.