Abstract
Scribing characteristics of mono-crystalline sapphire by using THG:YAG laser of 355 nm in wavelength were experimentally investigated. The influence of polarization plane of laser beam on the curved shape at the tip of groove was also discussed. Moreover, the reflection of laser beam was experimentally investigated in order to clarify the generation mechanism of curved shape. The absorptivity of laser beam at high pulse repetition rate was still kept at higher order, although the feed rate became high. Therefore, the high pulse repetition rate condition is very effective for the laser scribing of sapphire. The curved shape at the tip of groove was greatly influenced by the direction of polarization plane of laser beam. This phenomenon occurred not randomly but regularly depending on the angle of polarization plane. The laser beam was reflected strongly in the direction of curved shape generation, in other words, in the vertical direction to the polarization plane of laser beam,. Therefore, the reflection of laser beam from the processing point has a close relation to the curved shape at the tip of the groove. As a result, a suitable setting of polarization plane could make the straight groove without the occurrence of curved shape.
| Original language | English |
|---|---|
| Title of host publication | ICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings |
| Pages | 1080-1085 |
| Number of pages | 6 |
| Volume | 102 |
| Publication status | Published - 2009 |
| Event | 28th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2009 - Orlando, FL, United States Duration: Nov 2 2009 → Nov 5 2009 |
Other
| Other | 28th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2009 |
|---|---|
| Country | United States |
| City | Orlando, FL |
| Period | 11/2/09 → 11/5/09 |
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ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Electronic, Optical and Magnetic Materials
Cite this
Influence of polarization plane on groove shape in scribing of sapphire by THG : YAG laser. / Okamoto, Yasuhiro; Sakagawa, Tomokazu; Uno, Yoshiyuki; Mukoya, Yutaka; Okamura, Yuki.
ICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings. Vol. 102 2009. p. 1080-1085.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Influence of polarization plane on groove shape in scribing of sapphire by THG
T2 - YAG laser
AU - Okamoto, Yasuhiro
AU - Sakagawa, Tomokazu
AU - Uno, Yoshiyuki
AU - Mukoya, Yutaka
AU - Okamura, Yuki
PY - 2009
Y1 - 2009
N2 - Scribing characteristics of mono-crystalline sapphire by using THG:YAG laser of 355 nm in wavelength were experimentally investigated. The influence of polarization plane of laser beam on the curved shape at the tip of groove was also discussed. Moreover, the reflection of laser beam was experimentally investigated in order to clarify the generation mechanism of curved shape. The absorptivity of laser beam at high pulse repetition rate was still kept at higher order, although the feed rate became high. Therefore, the high pulse repetition rate condition is very effective for the laser scribing of sapphire. The curved shape at the tip of groove was greatly influenced by the direction of polarization plane of laser beam. This phenomenon occurred not randomly but regularly depending on the angle of polarization plane. The laser beam was reflected strongly in the direction of curved shape generation, in other words, in the vertical direction to the polarization plane of laser beam,. Therefore, the reflection of laser beam from the processing point has a close relation to the curved shape at the tip of the groove. As a result, a suitable setting of polarization plane could make the straight groove without the occurrence of curved shape.
AB - Scribing characteristics of mono-crystalline sapphire by using THG:YAG laser of 355 nm in wavelength were experimentally investigated. The influence of polarization plane of laser beam on the curved shape at the tip of groove was also discussed. Moreover, the reflection of laser beam was experimentally investigated in order to clarify the generation mechanism of curved shape. The absorptivity of laser beam at high pulse repetition rate was still kept at higher order, although the feed rate became high. Therefore, the high pulse repetition rate condition is very effective for the laser scribing of sapphire. The curved shape at the tip of groove was greatly influenced by the direction of polarization plane of laser beam. This phenomenon occurred not randomly but regularly depending on the angle of polarization plane. The laser beam was reflected strongly in the direction of curved shape generation, in other words, in the vertical direction to the polarization plane of laser beam,. Therefore, the reflection of laser beam from the processing point has a close relation to the curved shape at the tip of the groove. As a result, a suitable setting of polarization plane could make the straight groove without the occurrence of curved shape.
UR - http://www.scopus.com/inward/record.url?scp=77953876723&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=77953876723&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:77953876723
SN - 9780912035598
VL - 102
SP - 1080
EP - 1085
BT - ICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings
ER -