Influence of polarization plane on groove shape in scribing of sapphire by THG: YAG laser

Yasuhiro Okamoto, Tomokazu Sakagawa, Yoshiyuki Uno, Yutaka Mukoya, Yuki Okamura

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Scribing characteristics of mono-crystalline sapphire by using THG:YAG laser of 355 nm in wavelength were experimentally investigated. The influence of polarization plane of laser beam on the curved shape at the tip of groove was also discussed. Moreover, the reflection of laser beam was experimentally investigated in order to clarify the generation mechanism of curved shape. The absorptivity of laser beam at high pulse repetition rate was still kept at higher order, although the feed rate became high. Therefore, the high pulse repetition rate condition is very effective for the laser scribing of sapphire. The curved shape at the tip of groove was greatly influenced by the direction of polarization plane of laser beam. This phenomenon occurred not randomly but regularly depending on the angle of polarization plane. The laser beam was reflected strongly in the direction of curved shape generation, in other words, in the vertical direction to the polarization plane of laser beam,. Therefore, the reflection of laser beam from the processing point has a close relation to the curved shape at the tip of the groove. As a result, a suitable setting of polarization plane could make the straight groove without the occurrence of curved shape.

Original languageEnglish
Title of host publicationICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings
Pages1080-1085
Number of pages6
Volume102
Publication statusPublished - 2009
Event28th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2009 - Orlando, FL, United States
Duration: Nov 2 2009Nov 5 2009

Other

Other28th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2009
CountryUnited States
CityOrlando, FL
Period11/2/0911/5/09

Fingerprint

Aluminum Oxide
Sapphire
Laser beams
Polarization
Lasers
Pulse repetition rate
Crystalline materials
Wavelength
Processing
Direction compound

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Okamoto, Y., Sakagawa, T., Uno, Y., Mukoya, Y., & Okamura, Y. (2009). Influence of polarization plane on groove shape in scribing of sapphire by THG: YAG laser. In ICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings (Vol. 102, pp. 1080-1085)

Influence of polarization plane on groove shape in scribing of sapphire by THG : YAG laser. / Okamoto, Yasuhiro; Sakagawa, Tomokazu; Uno, Yoshiyuki; Mukoya, Yutaka; Okamura, Yuki.

ICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings. Vol. 102 2009. p. 1080-1085.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Okamoto, Y, Sakagawa, T, Uno, Y, Mukoya, Y & Okamura, Y 2009, Influence of polarization plane on groove shape in scribing of sapphire by THG: YAG laser. in ICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings. vol. 102, pp. 1080-1085, 28th International Congress on Applications of Lasers and Electro-Optics, ICALEO 2009, Orlando, FL, United States, 11/2/09.
Okamoto Y, Sakagawa T, Uno Y, Mukoya Y, Okamura Y. Influence of polarization plane on groove shape in scribing of sapphire by THG: YAG laser. In ICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings. Vol. 102. 2009. p. 1080-1085
Okamoto, Yasuhiro ; Sakagawa, Tomokazu ; Uno, Yoshiyuki ; Mukoya, Yutaka ; Okamura, Yuki. / Influence of polarization plane on groove shape in scribing of sapphire by THG : YAG laser. ICALEO 2009 - 28th International Congress on Applications of Lasers and Electro-Optics, Congress Proceedings. Vol. 102 2009. pp. 1080-1085
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