Influence of Material Property on Thickness of Modified Layer Generated by Large-area Electron Beam

Togo Shinonaga, Yasuaki Kimura, Tsubasa Sakai, Akira Okada

Research output: Contribution to journalConference articlepeer-review

3 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Influence of Material Property on Thickness of Modified Layer Generated by Large-area Electron Beam'. Together they form a unique fingerprint.

Engineering & Materials Science