Influence of internal stress on amorphous structure of wet coated films derived from peroxa-poly tantalate solution

Akira Kishimoto

Research output: Contribution to journal › Article

Original languageEnglish
JournalThin Solid Films
Volume204
Publication statusPublished - 1991

Cite this

Influence of internal stress on amorphous structure of wet coated films derived from peroxa-poly tantalate solution. / Kishimoto, Akira.

In: Thin Solid Films, Vol. 204, 1991.

Research output: Contribution to journal › Article

Kishimoto, A 1991, 'Influence of internal stress on amorphous structure of wet coated films derived from peroxa-poly tantalate solution', Thin Solid Films, vol. 204.
Kishimoto A. Influence of internal stress on amorphous structure of wet coated films derived from peroxa-poly tantalate solution. Thin Solid Films. 1991;204.
Kishimoto, Akira. / Influence of internal stress on amorphous structure of wet coated films derived from peroxa-poly tantalate solution. In: Thin Solid Films. 1991 ; Vol. 204.
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