Improvement of Thermal Stability And Critical Current Of Superconducting Nb Multi-Layer Wiring

Keiji Tsukada, Jun Kawai, Hisashi Kado

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

A spiral coil of double-Nb layers is fabricated to investigate the thermal degradation mechanism of Nb multilayer wiring. The superconductivity of the coil with a sputtered SiO2insulation layer easily deteriorates as a result of surface oxidation where the step coverage is incomplete. Higher critical current and thermal stability are obtained by a combination of planarization using spin-coated SiO2for the insulation between Nb wiring, surface nitri- dation of Nb, and taper etching of the contact hole. The critical current of the coil with a spin-coated SiO2film is about twice that of a coil with sputtered SiO2even though it was baked at 300°C for 30 min for each layer.

Original languageEnglish
Pages (from-to)L1801-L1803
JournalJapanese Journal of Applied Physics
Volume32
Issue number12 B
DOIs
Publication statusPublished - Dec 1993
Externally publishedYes

Keywords

  • Critical current
  • Nb multi-layer
  • Planarization
  • Step coverage
  • Taper etching
  • Thermal stability

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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