Impedance Evaluation of Hydrogen Sensor Using Ultrathin Platinum Film

Translated title of the contribution: Impedance Evaluation of Hydrogen Sensor Using Ultrathin Platinum Film

Shuzo Takeichi, Yuki Ushita, Ryosuke Sugai, Kenji Sakai, Toshihiko Kiwa, Keiji Tsukada

Research output: Contribution to journalArticle

Abstract

Hydrogen response characteristics of Pt/Ti film were evaluated by impedance measurement. The sensitivity of Pt/Ti film as a function of hydrogen concentration was measured by DC resistance. According to decrements of thickness, the resistivity change ratio increased. However, the response time to hydrogen gas was insufficient at room temperature, and therefore, pulsed heating was conducted to speed up the response time with low power consumption. The effect of these results of thickness dependence and the pulsed heating suggests the hydrogen response mechanism is based on the surface reaction. Therefore, AC impedance measurement was conducted to analyze the conduction mechanism of ultrathin film. As a result, Pt/Ti film is assumed to be a parallel RC circuit due to the surface roughness. In addition, both resistance and capacitance were changed and frequency dependence was observed, when exposed to hydrogen, by the AC impedance measurement. From the result of measurement and calculation, the capacitance changes occurred in high frequency by the skin effect. The carrier and proton generated by the catalytic reaction of hydrogen were thought to exist near the surface.
Translated title of the contributionImpedance Evaluation of Hydrogen Sensor Using Ultrathin Platinum Film
Original languageJapanese
Pages (from-to)69-72
Number of pages4
JournalTransactions of the Materials Research Society of Japan
Volume40
Issue number1
DOIs
Publication statusPublished - 2015

Keywords

  • hydrogen sensor
  • Pt ultrathin film
  • impedance measurement
  • pulsed heating
  • capacitance change

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