Abstract
We present the redesign and improved performance of the laser terahertz emission microscope (LTEM), which is a potential tool for locating electrical failures in integrated circuits. The LTEM produces an image of the THz waves emitted when the circuit is irradiated by a femtosecond laser; the amplitude of the THz emission is proportional to the local electric field. By redesigning the optical setup and improving the spatial resolution of the system to below 3 μm, we could extend its application to examining of large-scale integration circuits. As example we show the THz emission pattern of the electric field in an 8-bit microprocessor chip under bias voltage.
Original language | English |
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Pages (from-to) | 115-120 |
Number of pages | 6 |
Journal | Optics Express |
Volume | 13 |
Issue number | 1 |
DOIs | |
Publication status | Published - Jan 2005 |
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics