Hydrothermally deposited PZT thin film vibration probe sensor

Misato Sasaki, Takefumi Kanda, Minoru Kuribayashi Kurosawa, Toshiro Higuchi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We have fabricated a touch probe sensor using PZT thin film vibrator. This sensor was designed with the aim of realizing high resolution more than 0.5 nm, low contact force under 100 nN, a wide scanning range in mm scale square and quick scanning surface profile measurement. These features have advantages in measuring nano structure, for example sub micron rule VLSI or micro electro mechanical systems (MEMS). The sensitivity and resolution were 2.0×10-2 mV/nm and 2.4 nm. The sensor device was installed in AFM. Then an image of surface texture was obtained.

Original languageEnglish
Title of host publicationProceedings of the IEEE Ultrasonics Symposium
EditorsD.E. Yuhas, S.C. Schneider
Pages449-452
Number of pages4
Volume1
Publication statusPublished - 2002
Event2002 IEEE Ultrasonics Symposium - Munich, Germany
Duration: Oct 8 2002Oct 11 2002

Other

Other2002 IEEE Ultrasonics Symposium
CountryGermany
CityMunich
Period10/8/0210/11/02

Fingerprint

Thin films
Sensors
Scanning
Vibrators
Surface measurement
Textures

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Sasaki, M., Kanda, T., Kurosawa, M. K., & Higuchi, T. (2002). Hydrothermally deposited PZT thin film vibration probe sensor. In D. E. Yuhas, & S. C. Schneider (Eds.), Proceedings of the IEEE Ultrasonics Symposium (Vol. 1, pp. 449-452)

Hydrothermally deposited PZT thin film vibration probe sensor. / Sasaki, Misato; Kanda, Takefumi; Kurosawa, Minoru Kuribayashi; Higuchi, Toshiro.

Proceedings of the IEEE Ultrasonics Symposium. ed. / D.E. Yuhas; S.C. Schneider. Vol. 1 2002. p. 449-452.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Sasaki, M, Kanda, T, Kurosawa, MK & Higuchi, T 2002, Hydrothermally deposited PZT thin film vibration probe sensor. in DE Yuhas & SC Schneider (eds), Proceedings of the IEEE Ultrasonics Symposium. vol. 1, pp. 449-452, 2002 IEEE Ultrasonics Symposium, Munich, Germany, 10/8/02.
Sasaki M, Kanda T, Kurosawa MK, Higuchi T. Hydrothermally deposited PZT thin film vibration probe sensor. In Yuhas DE, Schneider SC, editors, Proceedings of the IEEE Ultrasonics Symposium. Vol. 1. 2002. p. 449-452
Sasaki, Misato ; Kanda, Takefumi ; Kurosawa, Minoru Kuribayashi ; Higuchi, Toshiro. / Hydrothermally deposited PZT thin film vibration probe sensor. Proceedings of the IEEE Ultrasonics Symposium. editor / D.E. Yuhas ; S.C. Schneider. Vol. 1 2002. pp. 449-452
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