Hydrothermally deposited PZT thin film vibration probe sensor

Misato Sasaki; Takefumi Kanda; Minoru Kuribayashi Kurosawa; Toshiro Higuchi

Hydrothermally deposited PZT thin film vibration probe sensor

Misato Sasaki, Takefumi Kanda, Minoru Kuribayashi Kurosawa, Toshiro Higuchi

Research output: Contribution to journal › Conference article › peer-review

Abstract

We have fabricated a touch probe sensor using PZT thin film vibrator. This sensor was designed with the aim of realizing high resolution more than 0.5 nm, low contact force under 100 nN, a wide scanning range in mm scale square and quick scanning surface profile measurement. These features have advantages in measuring nano structure, for example sub micron rule VLSI or micro electro mechanical systems (MEMS). The sensitivity and resolution were 2.0×10^-2 mV/nm and 2.4 nm. The sensor device was installed in AFM. Then an image of surface texture was obtained.

Original language	English
Pages (from-to)	449-452
Number of pages	4
Journal	Proceedings of the IEEE Ultrasonics Symposium
Volume	1
Publication status	Published - Dec 1 2002
Event	2002 IEEE Ultrasonics Symposium - Munich, Germany Duration: Oct 8 2002 → Oct 11 2002

ASJC Scopus subject areas

Acoustics and Ultrasonics

Cite this

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title = "Hydrothermally deposited PZT thin film vibration probe sensor",

abstract = "We have fabricated a touch probe sensor using PZT thin film vibrator. This sensor was designed with the aim of realizing high resolution more than 0.5 nm, low contact force under 100 nN, a wide scanning range in mm scale square and quick scanning surface profile measurement. These features have advantages in measuring nano structure, for example sub micron rule VLSI or micro electro mechanical systems (MEMS). The sensitivity and resolution were 2.0×10-2 mV/nm and 2.4 nm. The sensor device was installed in AFM. Then an image of surface texture was obtained.",

author = "Misato Sasaki and Takefumi Kanda and Kurosawa, {Minoru Kuribayashi} and Toshiro Higuchi",

year = "2002",

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journal = "Proceedings of the IEEE Ultrasonics Symposium",

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note = "2002 IEEE Ultrasonics Symposium ; Conference date: 08-10-2002 Through 11-10-2002",

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AU - Sasaki, Misato

AU - Kanda, Takefumi

AU - Kurosawa, Minoru Kuribayashi

AU - Higuchi, Toshiro

PY - 2002/12/1

Y1 - 2002/12/1

N2 - We have fabricated a touch probe sensor using PZT thin film vibrator. This sensor was designed with the aim of realizing high resolution more than 0.5 nm, low contact force under 100 nN, a wide scanning range in mm scale square and quick scanning surface profile measurement. These features have advantages in measuring nano structure, for example sub micron rule VLSI or micro electro mechanical systems (MEMS). The sensitivity and resolution were 2.0×10-2 mV/nm and 2.4 nm. The sensor device was installed in AFM. Then an image of surface texture was obtained.

AB - We have fabricated a touch probe sensor using PZT thin film vibrator. This sensor was designed with the aim of realizing high resolution more than 0.5 nm, low contact force under 100 nN, a wide scanning range in mm scale square and quick scanning surface profile measurement. These features have advantages in measuring nano structure, for example sub micron rule VLSI or micro electro mechanical systems (MEMS). The sensitivity and resolution were 2.0×10-2 mV/nm and 2.4 nm. The sensor device was installed in AFM. Then an image of surface texture was obtained.

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M3 - Conference article

AN - SCOPUS:0036996291

VL - 1

SP - 449

EP - 452

JO - Proceedings of the IEEE Ultrasonics Symposium

JF - Proceedings of the IEEE Ultrasonics Symposium

SN - 1051-0117

T2 - 2002 IEEE Ultrasonics Symposium

Y2 - 8 October 2002 through 11 October 2002

ER -

Hydrothermally deposited PZT thin film vibration probe sensor

Abstract

ASJC Scopus subject areas

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