Abstract
We have fabricated a touch probe sensor using PZT thin film vibrator. This sensor was designed with the aim of realizing high resolution more than 0.5 nm, low contact force under 100 nN, a wide scanning range in mm scale square and quick scanning surface profile measurement. These features have advantages in measuring nano structure, for example sub micron rule VLSI or micro electro mechanical systems (MEMS). The sensitivity and resolution were 2.0×10-2 mV/nm and 2.4 nm. The sensor device was installed in AFM. Then an image of surface texture was obtained.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the IEEE Ultrasonics Symposium |
| Editors | D.E. Yuhas, S.C. Schneider |
| Pages | 449-452 |
| Number of pages | 4 |
| Volume | 1 |
| Publication status | Published - 2002 |
| Event | 2002 IEEE Ultrasonics Symposium - Munich, Germany Duration: Oct 8 2002 → Oct 11 2002 |
Other
| Other | 2002 IEEE Ultrasonics Symposium |
|---|---|
| Country | Germany |
| City | Munich |
| Period | 10/8/02 → 10/11/02 |
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ASJC Scopus subject areas
- Engineering(all)
Cite this
Hydrothermally deposited PZT thin film vibration probe sensor. / Sasaki, Misato; Kanda, Takefumi; Kurosawa, Minoru Kuribayashi; Higuchi, Toshiro.
Proceedings of the IEEE Ultrasonics Symposium. ed. / D.E. Yuhas; S.C. Schneider. Vol. 1 2002. p. 449-452.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Hydrothermally deposited PZT thin film vibration probe sensor
AU - Sasaki, Misato
AU - Kanda, Takefumi
AU - Kurosawa, Minoru Kuribayashi
AU - Higuchi, Toshiro
PY - 2002
Y1 - 2002
N2 - We have fabricated a touch probe sensor using PZT thin film vibrator. This sensor was designed with the aim of realizing high resolution more than 0.5 nm, low contact force under 100 nN, a wide scanning range in mm scale square and quick scanning surface profile measurement. These features have advantages in measuring nano structure, for example sub micron rule VLSI or micro electro mechanical systems (MEMS). The sensitivity and resolution were 2.0×10-2 mV/nm and 2.4 nm. The sensor device was installed in AFM. Then an image of surface texture was obtained.
AB - We have fabricated a touch probe sensor using PZT thin film vibrator. This sensor was designed with the aim of realizing high resolution more than 0.5 nm, low contact force under 100 nN, a wide scanning range in mm scale square and quick scanning surface profile measurement. These features have advantages in measuring nano structure, for example sub micron rule VLSI or micro electro mechanical systems (MEMS). The sensitivity and resolution were 2.0×10-2 mV/nm and 2.4 nm. The sensor device was installed in AFM. Then an image of surface texture was obtained.
UR - http://www.scopus.com/inward/record.url?scp=0036996291&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0036996291&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:0036996291
VL - 1
SP - 449
EP - 452
BT - Proceedings of the IEEE Ultrasonics Symposium
A2 - Yuhas, D.E.
A2 - Schneider, S.C.
ER -