Abstract
We have fabricated a touch probe sensor using PZT thin film vibrator. This sensor was designed with the aim of realizing high resolution more than 0.5 nm, low contact force under 100 nN, a wide scanning range in mm scale square and quick scanning surface profile measurement. These features have advantages in measuring nano structure, for example sub micron rule VLSI or micro electro mechanical systems (MEMS). The sensitivity and resolution were 2.0×10-2 mV/nm and 2.4 nm. The sensor device was installed in AFM. Then an image of surface texture was obtained.
| Original language | English |
|---|---|
| Pages (from-to) | 449-452 |
| Number of pages | 4 |
| Journal | Proceedings of the IEEE Ultrasonics Symposium |
| Volume | 1 |
| Publication status | Published - Dec 1 2002 |
| Event | 2002 IEEE Ultrasonics Symposium - Munich, Germany Duration: Oct 8 2002 → Oct 11 2002 |
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ASJC Scopus subject areas
- Acoustics and Ultrasonics
Cite this
Sasaki, M., Kanda, T., Kurosawa, M. K., & Higuchi, T. (2002). Hydrothermally deposited PZT thin film vibration probe sensor. Proceedings of the IEEE Ultrasonics Symposium, 1, 449-452.