Hydrothermal deposition of the PZT film and applications of piezoelectric actuators

Daichi Nakahira, Takefumi Kanda, Koichi Suzumori, Masao Kabuto, Yoshihiko Michihiro, Masahiro Ueno

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this paper, PZT film has been deposited on Ti substrate by using a hydrothermal method. The hydrothermal reaction solution was stirred by 2 types of methods. One mixing method was a rotation mixing method and the other was an ultrasonic vibration mixing method. Bimorph actuators were fabricated and evaluated with displacement measurement. Because of holding the autoclave, the ultrasonic vibration mixing device was less of a load to the substrate. Therefore, micro-positioning stage has been fabricated on a comparatively large and high-aspect ratio titanium structure by using the ultrasonic vibration mixing device. The hydrothermal method can easily deposit on the three-dimensional substrate. Thus, we have deposited PZT film on a hemispherical shape Ti substrate and fabricated an ultrasonic transducer by using the rotation mixing device. The ultrasonic transducer was evaluated by under water experiment.

Original languageEnglish
Title of host publication2012 19th International Conference on Mechatronics and Machine Vision in Practice, M2VIP 2012
Pages501-506
Number of pages6
Publication statusPublished - Dec 1 2012
Event2012 19th International Conference on Mechatronics and Machine Vision in Practice, M2VIP 2012 - Auckland, New Zealand
Duration: Nov 28 2012Nov 30 2012

Publication series

Name2012 19th International Conference on Mechatronics and Machine Vision in Practice, M2VIP 2012

Other

Other2012 19th International Conference on Mechatronics and Machine Vision in Practice, M2VIP 2012
CountryNew Zealand
CityAuckland
Period11/28/1211/30/12

Keywords

  • Hydrothermal method
  • PZT film
  • Piezoelectric actuator
  • Piezoelectric transducer

ASJC Scopus subject areas

  • Computer Vision and Pattern Recognition
  • Electrical and Electronic Engineering
  • Mechanical Engineering

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  • Cite this

    Nakahira, D., Kanda, T., Suzumori, K., Kabuto, M., Michihiro, Y., & Ueno, M. (2012). Hydrothermal deposition of the PZT film and applications of piezoelectric actuators. In 2012 19th International Conference on Mechatronics and Machine Vision in Practice, M2VIP 2012 (pp. 501-506). [6484639] (2012 19th International Conference on Mechatronics and Machine Vision in Practice, M2VIP 2012).