Hydrothermal deposition of the PZT film and applications of piezoelectric actuators

Daichi Nakahira; Takefumi Kanda; Koichi Suzumori; Masao Kabuto; Yoshihiko Michihiro; Masahiro Ueno

Hydrothermal deposition of the PZT film and applications of piezoelectric actuators

Daichi Nakahira, Takefumi Kanda, Koichi Suzumori, Masao Kabuto, Yoshihiko Michihiro, Masahiro Ueno

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

In this paper, PZT film has been deposited on Ti substrate by using a hydrothermal method. The hydrothermal reaction solution was stirred by 2 types of methods. One mixing method was a rotation mixing method and the other was an ultrasonic vibration mixing method. Bimorph actuators were fabricated and evaluated with displacement measurement. Because of holding the autoclave, the ultrasonic vibration mixing device was less of a load to the substrate. Therefore, micro-positioning stage has been fabricated on a comparatively large and high-aspect ratio titanium structure by using the ultrasonic vibration mixing device. The hydrothermal method can easily deposit on the three-dimensional substrate. Thus, we have deposited PZT film on a hemispherical shape Ti substrate and fabricated an ultrasonic transducer by using the rotation mixing device. The ultrasonic transducer was evaluated by under water experiment.

Original language	English
Title of host publication	2012 19th International Conference on Mechatronics and Machine Vision in Practice, M2VIP 2012
Pages	501-506
Number of pages	6
Publication status	Published - Dec 1 2012
Event	2012 19th International Conference on Mechatronics and Machine Vision in Practice, M2VIP 2012 - Auckland, New Zealand Duration: Nov 28 2012 → Nov 30 2012

Publication series

Name	2012 19th International Conference on Mechatronics and Machine Vision in Practice, M2VIP 2012

Other

Other	2012 19th International Conference on Mechatronics and Machine Vision in Practice, M2VIP 2012
Country/Territory	New Zealand
City	Auckland
Period	11/28/12 → 11/30/12

Keywords

Hydrothermal method
PZT film
Piezoelectric actuator
Piezoelectric transducer

ASJC Scopus subject areas

Computer Vision and Pattern Recognition
Electrical and Electronic Engineering
Mechanical Engineering

Cite this

Nakahira, D., Kanda, T., Suzumori, K., Kabuto, M., Michihiro, Y., & Ueno, M. (2012). Hydrothermal deposition of the PZT film and applications of piezoelectric actuators. In 2012 19th International Conference on Mechatronics and Machine Vision in Practice, M2VIP 2012 (pp. 501-506). [6484639] (2012 19th International Conference on Mechatronics and Machine Vision in Practice, M2VIP 2012).

Hydrothermal deposition of the PZT film and applications of piezoelectric actuators. / Nakahira, Daichi; Kanda, Takefumi; Suzumori, Koichi et al.

2012 19th International Conference on Mechatronics and Machine Vision in Practice, M2VIP 2012. 2012. p. 501-506 6484639 (2012 19th International Conference on Mechatronics and Machine Vision in Practice, M2VIP 2012).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Nakahira, D, Kanda, T, Suzumori, K, Kabuto, M, Michihiro, Y & Ueno, M 2012, Hydrothermal deposition of the PZT film and applications of piezoelectric actuators. in 2012 19th International Conference on Mechatronics and Machine Vision in Practice, M2VIP 2012., 6484639, 2012 19th International Conference on Mechatronics and Machine Vision in Practice, M2VIP 2012, pp. 501-506, 2012 19th International Conference on Mechatronics and Machine Vision in Practice, M2VIP 2012, Auckland, New Zealand, 11/28/12.

Nakahira D, Kanda T, Suzumori K, Kabuto M, Michihiro Y, Ueno M. Hydrothermal deposition of the PZT film and applications of piezoelectric actuators. In 2012 19th International Conference on Mechatronics and Machine Vision in Practice, M2VIP 2012. 2012. p. 501-506. 6484639. (2012 19th International Conference on Mechatronics and Machine Vision in Practice, M2VIP 2012).

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AU - Ueno, Masahiro

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Hydrothermal deposition of the PZT film and applications of piezoelectric actuators

Abstract

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Keywords

ASJC Scopus subject areas

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