TY - JOUR
T1 - Hydrogen selectivity of a proton-pumping gate FET hydrogen sensor in an AC modulation mode
AU - Yamaguchi, Tomiharu
AU - Takisawa, Masanori
AU - Kiwa, Toshihiko
AU - Yamada, Hironobu
AU - Tsukada, Keiji
N1 - Copyright:
Copyright 2012 Elsevier B.V., All rights reserved.
PY - 2009
Y1 - 2009
N2 - The response characteristics of a proton pumping gate FET (PPG-FET) with a triple layer gate structure (Pd/proton conducting polymer/Pt) to various gases were investigated. Two kinds of hydrogen response signals (DC and AC) were obtained from the PPG-FET when the AC bias voltage was applied between the gate electrodes of the PPG-FET. The DC signals showed high hydrogen sensitivities and the sensitivities were about -30 mV/decade. Additionally, the AC signal decreased by 10 mV with increase in the hydrogen concentration from 100 ppm to 10%. Whereas the DC signals decreased slightly with increasing oxygen concentration, the oxygen response was much smaller than the DC hydrogen sensitivities. In contrast, the AC signal hardly responded to oxygen. This is because a proton conducting polymer layer prevents the movement of oxygen ions. Additionally, the proton pumping gate FET showed good selectivity against other gases (methane, ethane, ammonia, and methanol). These results clarify the high hydrogen sensitivity of the PPG-FET in an AC modulation mode.
AB - The response characteristics of a proton pumping gate FET (PPG-FET) with a triple layer gate structure (Pd/proton conducting polymer/Pt) to various gases were investigated. Two kinds of hydrogen response signals (DC and AC) were obtained from the PPG-FET when the AC bias voltage was applied between the gate electrodes of the PPG-FET. The DC signals showed high hydrogen sensitivities and the sensitivities were about -30 mV/decade. Additionally, the AC signal decreased by 10 mV with increase in the hydrogen concentration from 100 ppm to 10%. Whereas the DC signals decreased slightly with increasing oxygen concentration, the oxygen response was much smaller than the DC hydrogen sensitivities. In contrast, the AC signal hardly responded to oxygen. This is because a proton conducting polymer layer prevents the movement of oxygen ions. Additionally, the proton pumping gate FET showed good selectivity against other gases (methane, ethane, ammonia, and methanol). These results clarify the high hydrogen sensitivity of the PPG-FET in an AC modulation mode.
KW - Field effect transistor
KW - Hydrogen gas sensor
KW - Hydrogen selectivity
KW - Proton pumping gate
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U2 - 10.1541/ieejsmas.129.110
DO - 10.1541/ieejsmas.129.110
M3 - Article
AN - SCOPUS:67650479820
VL - 129
SP - 110
EP - 114
JO - IEEJ Transactions on Sensors and Micromachines
JF - IEEJ Transactions on Sensors and Micromachines
SN - 1341-8939
IS - 4
ER -