Highly reduced anatase TiO2-δ thin films obtained via low-temperature reduction

Atsushi Kitada, Shigeru Kasahara, Takahito Terashima, Kazuyoshi Yoshimura, Yoji Kobayashi, Hiroshi Kageyama

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14 Citations (Scopus)


We report the preparation and physical properties of reduced anatase TiO2-δ thin films obtained via a low-temperature (low-T) reduction using CaH2. The oxygen amounts were controlled in a wider range than ever reported. Some highly reduced anatase films showed resistivities as low as 10-3 ωcm at room temperature, both in metallic and semiconducting states. The most conducting metallic sample has very high carrier concentration of 1:6 × 1021 cm-3, comparable with those of metal-doped anatase films. Moreover, the magnetoresistance of the films changed its sign twice as a function of δ.

Original languageEnglish
Article number035801
JournalApplied Physics Express
Issue number3
Publication statusPublished - Mar 2011
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)


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