High-quality and reliable removal method of ZnO by ns pulsed fiber laser with square core optical fiber

Norio Nishi, Yasuhiro Okamoto, Akira Okada, Shin Ichi Nakashiba, Tomokazu Sakagawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Effects of edge intensity distribution in top-hat mode on removal characteristics of zinc oxide film was experimentally investigated by a nano-second pulsed fiber laser. The usage of mask could change the edge intensity distribution of laser beam. The combination of singlet lens and slit mask could perform the gradual edge and the sharp edge intensity distributions in parallel and perpendicular directions to a scanning line, respectively. This edge intensity combination could achieve high-quality removal with narrow damaged regions around the scribed grooves and reliable removal with stable electrical insulation states at more than a proper overlap rate.

Original languageEnglish
Title of host publicationProceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015
PublisherJapan Society of Mechanical Engineers
Publication statusPublished - Oct 18 2015
Event8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015 - Kyoto, Japan
Duration: Oct 18 2015Oct 22 2015

Other

Other8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015
CountryJapan
CityKyoto
Period10/18/1510/22/15

Keywords

  • Intensity distribution
  • Mask
  • Nano-second pulsed fiber laser
  • Square core optical fiber
  • ZnO

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

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  • Cite this

    Nishi, N., Okamoto, Y., Okada, A., Nakashiba, S. I., & Sakagawa, T. (2015). High-quality and reliable removal method of ZnO by ns pulsed fiber laser with square core optical fiber. In Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015 Japan Society of Mechanical Engineers.