High-quality and reliable removal method of ZnO by ns pulsed fiber laser with square core optical fiber

Norio Nishi, Yasuhiro Okamoto, Akira Okada, Shin Ichi Nakashiba, Tomokazu Sakagawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Effects of edge intensity distribution in top-hat mode on removal characteristics of zinc oxide film was experimentally investigated by a nano-second pulsed fiber laser. The usage of mask could change the edge intensity distribution of laser beam. The combination of singlet lens and slit mask could perform the gradual edge and the sharp edge intensity distributions in parallel and perpendicular directions to a scanning line, respectively. This edge intensity combination could achieve high-quality removal with narrow damaged regions around the scribed grooves and reliable removal with stable electrical insulation states at more than a proper overlap rate.

Original languageEnglish
Title of host publicationProceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015
PublisherJapan Society of Mechanical Engineers
Publication statusPublished - Oct 18 2015
Event8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015 - Kyoto, Japan
Duration: Oct 18 2015Oct 22 2015

Other

Other8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015
CountryJapan
CityKyoto
Period10/18/1510/22/15

Fingerprint

Fiber lasers
Pulsed lasers
Optical fibers
Masks
Zinc oxide
Oxide films
Laser beams
Insulation
Lenses
Scanning

Keywords

  • Intensity distribution
  • Mask
  • Nano-second pulsed fiber laser
  • Square core optical fiber
  • ZnO

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

Cite this

Nishi, N., Okamoto, Y., Okada, A., Nakashiba, S. I., & Sakagawa, T. (2015). High-quality and reliable removal method of ZnO by ns pulsed fiber laser with square core optical fiber. In Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015 Japan Society of Mechanical Engineers.

High-quality and reliable removal method of ZnO by ns pulsed fiber laser with square core optical fiber. / Nishi, Norio; Okamoto, Yasuhiro; Okada, Akira; Nakashiba, Shin Ichi; Sakagawa, Tomokazu.

Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015. Japan Society of Mechanical Engineers, 2015.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nishi, N, Okamoto, Y, Okada, A, Nakashiba, SI & Sakagawa, T 2015, High-quality and reliable removal method of ZnO by ns pulsed fiber laser with square core optical fiber. in Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015. Japan Society of Mechanical Engineers, 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015, Kyoto, Japan, 10/18/15.
Nishi N, Okamoto Y, Okada A, Nakashiba SI, Sakagawa T. High-quality and reliable removal method of ZnO by ns pulsed fiber laser with square core optical fiber. In Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015. Japan Society of Mechanical Engineers. 2015
Nishi, Norio ; Okamoto, Yasuhiro ; Okada, Akira ; Nakashiba, Shin Ichi ; Sakagawa, Tomokazu. / High-quality and reliable removal method of ZnO by ns pulsed fiber laser with square core optical fiber. Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015. Japan Society of Mechanical Engineers, 2015.
@inproceedings{5866974fc7764601ad6123dd24f688b5,
title = "High-quality and reliable removal method of ZnO by ns pulsed fiber laser with square core optical fiber",
abstract = "Effects of edge intensity distribution in top-hat mode on removal characteristics of zinc oxide film was experimentally investigated by a nano-second pulsed fiber laser. The usage of mask could change the edge intensity distribution of laser beam. The combination of singlet lens and slit mask could perform the gradual edge and the sharp edge intensity distributions in parallel and perpendicular directions to a scanning line, respectively. This edge intensity combination could achieve high-quality removal with narrow damaged regions around the scribed grooves and reliable removal with stable electrical insulation states at more than a proper overlap rate.",
keywords = "Intensity distribution, Mask, Nano-second pulsed fiber laser, Square core optical fiber, ZnO",
author = "Norio Nishi and Yasuhiro Okamoto and Akira Okada and Nakashiba, {Shin Ichi} and Tomokazu Sakagawa",
year = "2015",
month = "10",
day = "18",
language = "English",
booktitle = "Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015",
publisher = "Japan Society of Mechanical Engineers",
address = "Japan",

}

TY - GEN

T1 - High-quality and reliable removal method of ZnO by ns pulsed fiber laser with square core optical fiber

AU - Nishi, Norio

AU - Okamoto, Yasuhiro

AU - Okada, Akira

AU - Nakashiba, Shin Ichi

AU - Sakagawa, Tomokazu

PY - 2015/10/18

Y1 - 2015/10/18

N2 - Effects of edge intensity distribution in top-hat mode on removal characteristics of zinc oxide film was experimentally investigated by a nano-second pulsed fiber laser. The usage of mask could change the edge intensity distribution of laser beam. The combination of singlet lens and slit mask could perform the gradual edge and the sharp edge intensity distributions in parallel and perpendicular directions to a scanning line, respectively. This edge intensity combination could achieve high-quality removal with narrow damaged regions around the scribed grooves and reliable removal with stable electrical insulation states at more than a proper overlap rate.

AB - Effects of edge intensity distribution in top-hat mode on removal characteristics of zinc oxide film was experimentally investigated by a nano-second pulsed fiber laser. The usage of mask could change the edge intensity distribution of laser beam. The combination of singlet lens and slit mask could perform the gradual edge and the sharp edge intensity distributions in parallel and perpendicular directions to a scanning line, respectively. This edge intensity combination could achieve high-quality removal with narrow damaged regions around the scribed grooves and reliable removal with stable electrical insulation states at more than a proper overlap rate.

KW - Intensity distribution

KW - Mask

KW - Nano-second pulsed fiber laser

KW - Square core optical fiber

KW - ZnO

UR - http://www.scopus.com/inward/record.url?scp=84974576953&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84974576953&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84974576953

BT - Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015

PB - Japan Society of Mechanical Engineers

ER -