High Performance Slicing Method of Monocrystalline Silicon Ingot by Wire EDM

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)219-223
Number of pages5
JournalProceedings of 10th International Conference on Precision Engineering
Publication statusPublished - 2001

Cite this

@article{b0498caae8d248558b552bfafe9e119d,
title = "High Performance Slicing Method of Monocrystalline Silicon Ingot by Wire EDM",
author = "Yasuhiro Okamoto",
year = "2001",
language = "English",
pages = "219--223",
journal = "Proceedings of 10th International Conference on Precision Engineering",

}

TY - JOUR

T1 - High Performance Slicing Method of Monocrystalline Silicon Ingot by Wire EDM

AU - Okamoto, Yasuhiro

PY - 2001

Y1 - 2001

M3 - Article

SP - 219

EP - 223

JO - Proceedings of 10th International Conference on Precision Engineering

JF - Proceedings of 10th International Conference on Precision Engineering

ER -