High Performance Slicing Method of Monocrystalline Silicon Ingot by Wire EDM

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)219-223
Number of pages5
JournalProc. of 10th International Conference on Precision Engineerin
Publication statusPublished - 2001

Cite this

@article{8e13c446701142b7a004e202fefb62e0,
title = "High Performance Slicing Method of Monocrystalline Silicon Ingot by Wire EDM",
author = "Akira Okada",
year = "2001",
language = "English",
pages = "219--223",
journal = "Proc. of 10th International Conference on Precision Engineerin",

}

TY - JOUR

T1 - High Performance Slicing Method of Monocrystalline Silicon Ingot by Wire EDM

AU - Okada, Akira

PY - 2001

Y1 - 2001

M3 - Article

SP - 219

EP - 223

JO - Proc. of 10th International Conference on Precision Engineerin

JF - Proc. of 10th International Conference on Precision Engineerin

ER -