High growth rate of vertically aligned carbon nanotubes using a plasma shield in microwave plasma-enhanced chemical vapor deposition

Hiroshi Kinoshita, Ippei Kume, Hirokazu Sakai, Masahito Tagawa, Nobuo Ohmae

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds