Hazard Assessment of a Semiconductor Manufacturing System by the Quantitative Process Hazard Analysis Method

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)147-149
Number of pages3
Journal2003 Asia Pacific Symposium on Safety
Publication statusPublished - 2003

Cite this

@article{d022bb1fc51a4686a544b108e1755c48,
title = "Hazard Assessment of a Semiconductor Manufacturing System by the Quantitative Process Hazard Analysis Method",
author = "Kazuhiko Suzuki",
year = "2003",
language = "English",
pages = "147--149",
journal = "2003 Asia Pacific Symposium on Safety",

}

TY - JOUR

T1 - Hazard Assessment of a Semiconductor Manufacturing System by the Quantitative Process Hazard Analysis Method

AU - Suzuki, Kazuhiko

PY - 2003

Y1 - 2003

M3 - Article

SP - 147

EP - 149

JO - 2003 Asia Pacific Symposium on Safety

JF - 2003 Asia Pacific Symposium on Safety

ER -