| Original language | English |
|---|---|
| Pages (from-to) | 147-149 |
| Number of pages | 3 |
| Journal | 2003 Asia Pacific Symposium on Safety |
| Publication status | Published - 2003 |
Cite this
Hazard Assessment of a Semiconductor Manufacturing System by the Quantitative Process Hazard Analysis Method. / Suzuki, Kazuhiko.
In: 2003 Asia Pacific Symposium on Safety, 2003, p. 147-149.Research output: Contribution to journal › Article
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title = "Hazard Assessment of a Semiconductor Manufacturing System by the Quantitative Process Hazard Analysis Method",
author = "Kazuhiko Suzuki",
year = "2003",
language = "English",
pages = "147--149",
journal = "2003 Asia Pacific Symposium on Safety",
}
TY - JOUR
T1 - Hazard Assessment of a Semiconductor Manufacturing System by the Quantitative Process Hazard Analysis Method
AU - Suzuki, Kazuhiko
PY - 2003
Y1 - 2003
M3 - Article
SP - 147
EP - 149
JO - 2003 Asia Pacific Symposium on Safety
JF - 2003 Asia Pacific Symposium on Safety
ER -