Hard X-ray photoelectron emission microscopy as tool for studying buried layers

Takanori Wakita, Toshiyuki Taniuchi, Kanta Ono, Motohiro Suzuki, Naomi Kawamura, Masafumi Takagaki, Hayato Miyagawa, Fang Zhun Guo, Tetsuya Nakamura, Takayuki Muro, Hiroyuki Akinaga, Takayoshi Yokoya, Masaharu Oshima, Keisuke Kobayashi

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

We have performed photoelectron emission microscopy measurements with hard X-rays (HX-PEEM) and have shown that HX-PEEM has a spatial resolution higher than 106nm for observing the sample surface and can detect signals from a Au layer buried under a 50-nm-thick Co layer. These results mean that HX-PEEM has a probing depth one order of magnitude deeper than that of PEEM with soft X-rays. This deeper probing depth with HX-PEEM provides a new opportunity to investigate electronic and/or magnetic structures of buried layers under a thick overlayer. The notable advantages and potential applications of HX-PEEM are discussed.

Original languageEnglish
Pages (from-to)1886-1888
Number of pages3
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume45
Issue number3 A
DOIs
Publication statusPublished - Mar 8 2006

Keywords

  • Buried layer
  • Deep probing depth
  • Hard X-rays
  • Photoelectron emission microscopy
  • Synchrotron radiation

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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  • Cite this

    Wakita, T., Taniuchi, T., Ono, K., Suzuki, M., Kawamura, N., Takagaki, M., Miyagawa, H., Guo, F. Z., Nakamura, T., Muro, T., Akinaga, H., Yokoya, T., Oshima, M., & Kobayashi, K. (2006). Hard X-ray photoelectron emission microscopy as tool for studying buried layers. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 45(3 A), 1886-1888. https://doi.org/10.1143/JJAP.45.1886