Abstract
The sputter deposition of ceramic film on metal mold steel surface by large-area electron beam (EB) irradiation was discussed. The large-area EB has high energy density enough to generate plasma above the workpiece surface during the surface smoothing process, which causes the sputtering of target material set near the workpiece surface. The sputter deposition of target material with simultaneous surface melting and resolidification of workpiece surface by large-area EB would improve the adhesion between the deposited film and the workpiece. Short ceramic tube made of alumina or zirconia as a target was put on the substrate surface of steel, and large-area EB was irradiated to the surface. The workpiece surface component and structure after the irradiation were investigated using EDX and XRD analysis, in order to discuss the possibility of large-area EB irradiation as a new coating method.
| Original language | English |
|---|---|
| Title of host publication | Procedia CIRP |
| Pages | 486-491 |
| Number of pages | 6 |
| Volume | 6 |
| DOIs | |
| Publication status | Published - 2013 |
| Event | 17th CIRP Conference on Electro Physical and Chemical Machining, ISEM 2013 - Leuven, Belgium Duration: Apr 8 2013 → Apr 12 2013 |
Other
| Other | 17th CIRP Conference on Electro Physical and Chemical Machining, ISEM 2013 |
|---|---|
| Country | Belgium |
| City | Leuven |
| Period | 4/8/13 → 4/12/13 |
Fingerprint
Keywords
- Alumina
- Hardness
- Large-area EB
- Sputter deposition
- Zirconia
ASJC Scopus subject areas
- Industrial and Manufacturing Engineering
- Control and Systems Engineering
Cite this
Fundamental study on sputter deposition of ceramic film by large-area electron beam irradiation. / Misumi, S.; Okada, Akira; Okamoto, Yasuhiro; Inoue, M.
Procedia CIRP. Vol. 6 2013. p. 486-491.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Fundamental study on sputter deposition of ceramic film by large-area electron beam irradiation
AU - Misumi, S.
AU - Okada, Akira
AU - Okamoto, Yasuhiro
AU - Inoue, M.
PY - 2013
Y1 - 2013
N2 - The sputter deposition of ceramic film on metal mold steel surface by large-area electron beam (EB) irradiation was discussed. The large-area EB has high energy density enough to generate plasma above the workpiece surface during the surface smoothing process, which causes the sputtering of target material set near the workpiece surface. The sputter deposition of target material with simultaneous surface melting and resolidification of workpiece surface by large-area EB would improve the adhesion between the deposited film and the workpiece. Short ceramic tube made of alumina or zirconia as a target was put on the substrate surface of steel, and large-area EB was irradiated to the surface. The workpiece surface component and structure after the irradiation were investigated using EDX and XRD analysis, in order to discuss the possibility of large-area EB irradiation as a new coating method.
AB - The sputter deposition of ceramic film on metal mold steel surface by large-area electron beam (EB) irradiation was discussed. The large-area EB has high energy density enough to generate plasma above the workpiece surface during the surface smoothing process, which causes the sputtering of target material set near the workpiece surface. The sputter deposition of target material with simultaneous surface melting and resolidification of workpiece surface by large-area EB would improve the adhesion between the deposited film and the workpiece. Short ceramic tube made of alumina or zirconia as a target was put on the substrate surface of steel, and large-area EB was irradiated to the surface. The workpiece surface component and structure after the irradiation were investigated using EDX and XRD analysis, in order to discuss the possibility of large-area EB irradiation as a new coating method.
KW - Alumina
KW - Hardness
KW - Large-area EB
KW - Sputter deposition
KW - Zirconia
UR - http://www.scopus.com/inward/record.url?scp=84883853610&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84883853610&partnerID=8YFLogxK
U2 - 10.1016/j.procir.2013.03.05
DO - 10.1016/j.procir.2013.03.05
M3 - Conference contribution
AN - SCOPUS:84883853610
VL - 6
SP - 486
EP - 491
BT - Procedia CIRP
ER -