Fundamental study on sputter deposition of ceramic film by large-area electron beam irradiation

S. Misumi, Akira Okada, Yasuhiro Okamoto, M. Inoue

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

The sputter deposition of ceramic film on metal mold steel surface by large-area electron beam (EB) irradiation was discussed. The large-area EB has high energy density enough to generate plasma above the workpiece surface during the surface smoothing process, which causes the sputtering of target material set near the workpiece surface. The sputter deposition of target material with simultaneous surface melting and resolidification of workpiece surface by large-area EB would improve the adhesion between the deposited film and the workpiece. Short ceramic tube made of alumina or zirconia as a target was put on the substrate surface of steel, and large-area EB was irradiated to the surface. The workpiece surface component and structure after the irradiation were investigated using EDX and XRD analysis, in order to discuss the possibility of large-area EB irradiation as a new coating method.

Original languageEnglish
Title of host publicationProcedia CIRP
Pages486-491
Number of pages6
Volume6
DOIs
Publication statusPublished - 2013
Event17th CIRP Conference on Electro Physical and Chemical Machining, ISEM 2013 - Leuven, Belgium
Duration: Apr 8 2013Apr 12 2013

Other

Other17th CIRP Conference on Electro Physical and Chemical Machining, ISEM 2013
CountryBelgium
CityLeuven
Period4/8/134/12/13

Fingerprint

Sputter deposition
Electron beams
Irradiation
Steel
Zirconia
Sputtering
Energy dispersive spectroscopy
Melting
Alumina
Adhesion
Plasmas
Coatings

Keywords

  • Alumina
  • Hardness
  • Large-area EB
  • Sputter deposition
  • Zirconia

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Control and Systems Engineering

Cite this

Fundamental study on sputter deposition of ceramic film by large-area electron beam irradiation. / Misumi, S.; Okada, Akira; Okamoto, Yasuhiro; Inoue, M.

Procedia CIRP. Vol. 6 2013. p. 486-491.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Misumi, S, Okada, A, Okamoto, Y & Inoue, M 2013, Fundamental study on sputter deposition of ceramic film by large-area electron beam irradiation. in Procedia CIRP. vol. 6, pp. 486-491, 17th CIRP Conference on Electro Physical and Chemical Machining, ISEM 2013, Leuven, Belgium, 4/8/13. https://doi.org/10.1016/j.procir.2013.03.05
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N2 - The sputter deposition of ceramic film on metal mold steel surface by large-area electron beam (EB) irradiation was discussed. The large-area EB has high energy density enough to generate plasma above the workpiece surface during the surface smoothing process, which causes the sputtering of target material set near the workpiece surface. The sputter deposition of target material with simultaneous surface melting and resolidification of workpiece surface by large-area EB would improve the adhesion between the deposited film and the workpiece. Short ceramic tube made of alumina or zirconia as a target was put on the substrate surface of steel, and large-area EB was irradiated to the surface. The workpiece surface component and structure after the irradiation were investigated using EDX and XRD analysis, in order to discuss the possibility of large-area EB irradiation as a new coating method.

AB - The sputter deposition of ceramic film on metal mold steel surface by large-area electron beam (EB) irradiation was discussed. The large-area EB has high energy density enough to generate plasma above the workpiece surface during the surface smoothing process, which causes the sputtering of target material set near the workpiece surface. The sputter deposition of target material with simultaneous surface melting and resolidification of workpiece surface by large-area EB would improve the adhesion between the deposited film and the workpiece. Short ceramic tube made of alumina or zirconia as a target was put on the substrate surface of steel, and large-area EB was irradiated to the surface. The workpiece surface component and structure after the irradiation were investigated using EDX and XRD analysis, in order to discuss the possibility of large-area EB irradiation as a new coating method.

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KW - Zirconia

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