Fundamental study on metal film coating by large-area EB irradiation

Masashi Takata, Togo Shinonaga, Akira Okada, Motohiro Inoue, Sadao Sano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationProceedings - ASPE 2015 Annual Meeting
PublisherAmerican Society for Precision Engineering, ASPE
Pages595-598
Number of pages4
ISBN (Print)9781887706698
Publication statusPublished - 2015
Event30th Annual Meeting of the American Society for Precision Engineering, ASPE 2015 - Austin, United States
Duration: Nov 1 2015Nov 6 2015

Other

Other30th Annual Meeting of the American Society for Precision Engineering, ASPE 2015
CountryUnited States
CityAustin
Period11/1/1511/6/15

ASJC Scopus subject areas

  • Control and Systems Engineering

Cite this

Takata, M., Shinonaga, T., Okada, A., Inoue, M., & Sano, S. (2015). Fundamental study on metal film coating by large-area EB irradiation. In Proceedings - ASPE 2015 Annual Meeting (pp. 595-598). American Society for Precision Engineering, ASPE.