Fundamental study 011 multi-wire EDM slicing for monocrystalline ingot: Effects of supply method of working fluid and wire speed oil machining characteristics

Yoshiyuki Uno, Akira Okada, Yasuhiro Okamoto, Katsutomo Suzuki, So Fflrota, Tameyoshi Fflrano, Shiro Takata, Kazuhiko Ishikawa

Research output: Contribution to conferencePaper

2 Citations (Scopus)

Abstract

A new slicing method of monocrystalline silicon ingot using wire electrical discharge machining was proposed for high efficiency and high quality slicing instead of inner diameter blade or multi-wire method. The effects of supply method of working fluid and wire speed on machining characteristics were experimentally investigated. It is clarified that the immersion method is superior than the nozzle supply method and the wire speed over 200 m /min is desirable for stable machining. Besides, mounting of wire sub-guide is useful for obtaining better kerf shape.

Original languageEnglish
Pages783-786
Number of pages4
Publication statusPublished - 2005
Event3rd International Conference on Leading Edge Manufacturing in 21st Century, LEM 2005 - Nagoya, Japan
Duration: Oct 19 2005Oct 22 2005

Other

Other3rd International Conference on Leading Edge Manufacturing in 21st Century, LEM 2005
CountryJapan
CityNagoya
Period10/19/0510/22/05

Keywords

  • Electrical discharge machining
  • Monocrystalline silicon
  • Multi-wire
  • Slicing

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

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  • Cite this

    Uno, Y., Okada, A., Okamoto, Y., Suzuki, K., Fflrota, S., Fflrano, T., Takata, S., & Ishikawa, K. (2005). Fundamental study 011 multi-wire EDM slicing for monocrystalline ingot: Effects of supply method of working fluid and wire speed oil machining characteristics. 783-786. Paper presented at 3rd International Conference on Leading Edge Manufacturing in 21st Century, LEM 2005, Nagoya, Japan.