Fundamental study 011 multi-wire EDM slicing for monocrystalline ingot: Effects of supply method of working fluid and wire speed oil machining characteristics

Yoshiyuki Uno; Akira Okada; Yasuhiro Okamoto; Katsutomo Suzuki; So Fflrota; Tameyoshi Fflrano; Shiro Takata; Kazuhiko Ishikawa

Fundamental study 011 multi-wire EDM slicing for monocrystalline ingot: Effects of supply method of working fluid and wire speed oil machining characteristics

Yoshiyuki Uno, Akira Okada, Yasuhiro Okamoto, Katsutomo Suzuki, So Fflrota, Tameyoshi Fflrano, Shiro Takata, Kazuhiko Ishikawa

Research output: Contribution to conference › Paper › peer-review

2 Citations (Scopus)

Abstract

A new slicing method of monocrystalline silicon ingot using wire electrical discharge machining was proposed for high efficiency and high quality slicing instead of inner diameter blade or multi-wire method. The effects of supply method of working fluid and wire speed on machining characteristics were experimentally investigated. It is clarified that the immersion method is superior than the nozzle supply method and the wire speed over 200 m /min is desirable for stable machining. Besides, mounting of wire sub-guide is useful for obtaining better kerf shape.

Original language	English
Pages	783-786
Number of pages	4
Publication status	Published - 2005
Event	3rd International Conference on Leading Edge Manufacturing in 21st Century, LEM 2005 - Nagoya, Japan Duration: Oct 19 2005 → Oct 22 2005

Other

Other	3rd International Conference on Leading Edge Manufacturing in 21st Century, LEM 2005
Country/Territory	Japan
City	Nagoya
Period	10/19/05 → 10/22/05

Keywords

Electrical discharge machining
Monocrystalline silicon
Multi-wire
Slicing

ASJC Scopus subject areas

Industrial and Manufacturing Engineering

Cite this

Uno, Y., Okada, A., Okamoto, Y., Suzuki, K., Fflrota, S., Fflrano, T., Takata, S., & Ishikawa, K. (2005). Fundamental study 011 multi-wire EDM slicing for monocrystalline ingot: Effects of supply method of working fluid and wire speed oil machining characteristics. 783-786. Paper presented at 3rd International Conference on Leading Edge Manufacturing in 21st Century, LEM 2005, Nagoya, Japan.

Fundamental study 011 multi-wire EDM slicing for monocrystalline ingot : Effects of supply method of working fluid and wire speed oil machining characteristics. / Uno, Yoshiyuki; Okada, Akira ; Okamoto, Yasuhiro et al.

2005. 783-786 Paper presented at 3rd International Conference on Leading Edge Manufacturing in 21st Century, LEM 2005, Nagoya, Japan.

Research output: Contribution to conference › Paper › peer-review

Uno, Y, Okada, A , Okamoto, Y, Suzuki, K, Fflrota, S, Fflrano, T, Takata, S & Ishikawa, K 2005, 'Fundamental study 011 multi-wire EDM slicing for monocrystalline ingot: Effects of supply method of working fluid and wire speed oil machining characteristics', Paper presented at 3rd International Conference on Leading Edge Manufacturing in 21st Century, LEM 2005, Nagoya, Japan, 10/19/05 - 10/22/05 pp. 783-786.

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abstract = "A new slicing method of monocrystalline silicon ingot using wire electrical discharge machining was proposed for high efficiency and high quality slicing instead of inner diameter blade or multi-wire method. The effects of supply method of working fluid and wire speed on machining characteristics were experimentally investigated. It is clarified that the immersion method is superior than the nozzle supply method and the wire speed over 200 m /min is desirable for stable machining. Besides, mounting of wire sub-guide is useful for obtaining better kerf shape.",

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author = "Yoshiyuki Uno and Akira Okada and Yasuhiro Okamoto and Katsutomo Suzuki and So Fflrota and Tameyoshi Fflrano and Shiro Takata and Kazuhiko Ishikawa",

year = "2005",

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T2 - 3rd International Conference on Leading Edge Manufacturing in 21st Century, LEM 2005

AU - Uno, Yoshiyuki

AU - Okada, Akira

AU - Okamoto, Yasuhiro

AU - Suzuki, Katsutomo

AU - Fflrota, So

AU - Fflrano, Tameyoshi

AU - Takata, Shiro

AU - Ishikawa, Kazuhiko

PY - 2005

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N2 - A new slicing method of monocrystalline silicon ingot using wire electrical discharge machining was proposed for high efficiency and high quality slicing instead of inner diameter blade or multi-wire method. The effects of supply method of working fluid and wire speed on machining characteristics were experimentally investigated. It is clarified that the immersion method is superior than the nozzle supply method and the wire speed over 200 m /min is desirable for stable machining. Besides, mounting of wire sub-guide is useful for obtaining better kerf shape.

AB - A new slicing method of monocrystalline silicon ingot using wire electrical discharge machining was proposed for high efficiency and high quality slicing instead of inner diameter blade or multi-wire method. The effects of supply method of working fluid and wire speed on machining characteristics were experimentally investigated. It is clarified that the immersion method is superior than the nozzle supply method and the wire speed over 200 m /min is desirable for stable machining. Besides, mounting of wire sub-guide is useful for obtaining better kerf shape.

KW - Electrical discharge machining

KW - Monocrystalline silicon

KW - Multi-wire

KW - Slicing

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Fundamental study 011 multi-wire EDM slicing for monocrystalline ingot: Effects of supply method of working fluid and wire speed oil machining characteristics

Abstract

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Keywords

ASJC Scopus subject areas

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