Formation of thin oxide films on room-temperature silicon (100) by exposure to a neutral beam of hyperthermal atomic and molecular oxygen

Masahito Tagawa, Tatsuhiko Ema, Hiroshi Kinoshita, Nobuo Ohmae, Masataka Umeno, Timothy K. Minton

Research output: Contribution to journal › Article › peer-review

18 Citations (Scopus)

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