Abstract
The flow disturbance to a pneumatic vibration isolation table causes periodic fluctuation of the table. In current study, one cycle of flow disturbance is estimated offline using a disturbance observer. The time series data of one cycle estimated disturbance is then stored in the memory of digital signal processor. The program codes are prepared which can detect every cycle of the flow disturbance based on the threshold of table position. The estimated signal is then repeatedly injected from the memory through a compensator to the servo valve to suppress table fluctuation due to periodic actual flow disturbance. The effectiveness of this method is demonstrated by experimental results.
| Original language | English |
|---|---|
| Pages (from-to) | 498-505 |
| Number of pages | 8 |
| Journal | Journal of Advanced Mechanical Design, Systems and Manufacturing |
| Volume | 7 |
| Issue number | 4 |
| DOIs | |
| Publication status | Published - 2013 |
| Externally published | Yes |
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Keywords
- Estimated Disturbance
- Flow Disturbance
- Pneumatic Isolation Table
- Supplied Air
ASJC Scopus subject areas
- Industrial and Manufacturing Engineering
- Mechanical Engineering
Cite this
Flow disturbance compensation based on off-line estimated signal for a pneumatic isolation table. / Shirani, Habiburahman; Nakamura, Yukinori; Wakui, Shinji.
In: Journal of Advanced Mechanical Design, Systems and Manufacturing, Vol. 7, No. 4, 2013, p. 498-505.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Flow disturbance compensation based on off-line estimated signal for a pneumatic isolation table
AU - Shirani, Habiburahman
AU - Nakamura, Yukinori
AU - Wakui, Shinji
PY - 2013
Y1 - 2013
N2 - The flow disturbance to a pneumatic vibration isolation table causes periodic fluctuation of the table. In current study, one cycle of flow disturbance is estimated offline using a disturbance observer. The time series data of one cycle estimated disturbance is then stored in the memory of digital signal processor. The program codes are prepared which can detect every cycle of the flow disturbance based on the threshold of table position. The estimated signal is then repeatedly injected from the memory through a compensator to the servo valve to suppress table fluctuation due to periodic actual flow disturbance. The effectiveness of this method is demonstrated by experimental results.
AB - The flow disturbance to a pneumatic vibration isolation table causes periodic fluctuation of the table. In current study, one cycle of flow disturbance is estimated offline using a disturbance observer. The time series data of one cycle estimated disturbance is then stored in the memory of digital signal processor. The program codes are prepared which can detect every cycle of the flow disturbance based on the threshold of table position. The estimated signal is then repeatedly injected from the memory through a compensator to the servo valve to suppress table fluctuation due to periodic actual flow disturbance. The effectiveness of this method is demonstrated by experimental results.
KW - Estimated Disturbance
KW - Flow Disturbance
KW - Pneumatic Isolation Table
KW - Supplied Air
UR - http://www.scopus.com/inward/record.url?scp=84882286018&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84882286018&partnerID=8YFLogxK
U2 - 10.1299/jamdsm.7.498
DO - 10.1299/jamdsm.7.498
M3 - Article
AN - SCOPUS:84882286018
VL - 7
SP - 498
EP - 505
JO - Journal of Advanced Mechanical Design, Systems and Manufacturing
JF - Journal of Advanced Mechanical Design, Systems and Manufacturing
SN - 1881-3054
IS - 4
ER -