@article{da9d4baa8236473cbe9b41d8de207733,
title = "Flow control valve for pneumatic actuators using particle excitation by PZT vibrator",
abstract = "This paper reports a new flow control valve for pneumatic actuators that has a lightweight and simple structure and uses particle excitation by PZT vibrator. The flow control valve in this report consists of an orifice plate which has plural orifices, PZT vibrator which is adhered on the orifice plate and iron particles. The valve is normally closed, because air flow carries the particles on to the orifice and particles seal the air flow. Because the orifice plate excitation by the PZT vibrator works to make the particles away from the orifice plate, the air flows through the orifices. It is driven at resonance mode and can be used as a variable speed controller for pneumatic actuators. The new flow control valve avoids the stopping shock of pneumatic actuators at the stroke ends while retaining the advantages of pneumatic actuators.",
keywords = "PZT, Pneumatic actuator, Pneumatic valve, Variable orifice",
author = "Daisuke Hirooka and Koichi Suzumori and Takefumi Kanda",
note = "Funding Information: This research was aided by the Koganei Corporation, who supported the fabrication of this valve's prototype. Daisuke Hirooka was born in Kobe, Japan, on August 24, 1983. He received the B. Eng. in Systems Engineering form Okayama University, Japan in 2007. Since 2007, he has been a graduate student at graduate school of Okayama University. His current research interest is in the mechatronics. Koichi Suzumori was born in 1959. He received the Doctor degree from Yokohama National University in 1990. He had worked for Toshiba R&D Center from 1984 to 2001, and worked also for Micromachine Center, Tokyo from 1999 to 2001. He has been a professor at Okayama University, Japan since 2001. He is a member of the Japan Society of Mechanical Engineers, the Robotics Society of Japan, IEEE and the Institute of Electrical Engineers of Japan. Takefumi Kanda was born in Fukuoka, Japan, on June 18, 1972. He received the B. Eng., the M. Eng. and the Dr. Eng. degrees in precision machinery engineering from The University of Tokyo, Japan in 1997, 1999 and 2002, respectively. From 2002, he was a research associate at the Graduate School of National Science and Technology, Okayama University, Japan. Since 2003, he has been a lecturer at Okayama University. His research interests are micro sensors, micro actuators, micro systems and piezoelectric film. He is a member of the Japan Society for Precision Engineering, the Institute of Electrical Engineers of Japan, IEEE, the Japan Society of Mechanical Engineers and the Robotics Society of Japan. ",
year = "2009",
month = oct,
doi = "10.1016/j.sna.2009.07.005",
language = "English",
volume = "155",
pages = "285--289",
journal = "Sensors and Actuators A: Physical",
issn = "0924-4247",
publisher = "Elsevier",
number = "2",
}