Film formation mechanism in alumina coating by large-area electron beam irradiation

Masashi Takata, Togo Shinonaga, Yasuhiro Okamoto, Akira Okada, Motohiro Inoue, Sadao Sano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In our previous studies, a thin alumina film formation was possible by a large-area EB irradiation using a alumina target tube. However, film formation mechanism has not yet been clarified. In this study, the influences of magnetic property and electrical conductivity of a jig supporting an alumina target tube on the film formation were investigated. The spectrum of plasma generated on the substrate surface was measured during the EB irradiation. The results indicated that the film was formed by sputtering target material with the plasma of workpiece material caused by EB irradiation, and the magnetic property of the jig greatly influences on the film formation.

Original languageEnglish
Title of host publicationProceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015
PublisherJapan Society of Mechanical Engineers
Publication statusPublished - Oct 18 2015
Event8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015 - Kyoto, Japan
Duration: Oct 18 2015Oct 22 2015

Other

Other8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015
CountryJapan
CityKyoto
Period10/18/1510/22/15

Fingerprint

Electron beams
Alumina
Irradiation
Coatings
Jigs
Magnetic properties
Plasmas
Sputtering
Substrates

Keywords

  • Alumina
  • Film formation mechanism
  • Large-area electron beam
  • Plasma spectroscopy
  • Sputter deposition

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering

Cite this

Takata, M., Shinonaga, T., Okamoto, Y., Okada, A., Inoue, M., & Sano, S. (2015). Film formation mechanism in alumina coating by large-area electron beam irradiation. In Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015 Japan Society of Mechanical Engineers.

Film formation mechanism in alumina coating by large-area electron beam irradiation. / Takata, Masashi; Shinonaga, Togo; Okamoto, Yasuhiro; Okada, Akira; Inoue, Motohiro; Sano, Sadao.

Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015. Japan Society of Mechanical Engineers, 2015.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Takata, M, Shinonaga, T, Okamoto, Y, Okada, A, Inoue, M & Sano, S 2015, Film formation mechanism in alumina coating by large-area electron beam irradiation. in Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015. Japan Society of Mechanical Engineers, 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015, Kyoto, Japan, 10/18/15.
Takata M, Shinonaga T, Okamoto Y, Okada A, Inoue M, Sano S. Film formation mechanism in alumina coating by large-area electron beam irradiation. In Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015. Japan Society of Mechanical Engineers. 2015
Takata, Masashi ; Shinonaga, Togo ; Okamoto, Yasuhiro ; Okada, Akira ; Inoue, Motohiro ; Sano, Sadao. / Film formation mechanism in alumina coating by large-area electron beam irradiation. Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015. Japan Society of Mechanical Engineers, 2015.
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AU - Sano, Sadao

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