Femtosecond Laser Processing and Evaluation of Broadband THz Anti-Reflection Structures

Haruyuki Sakurai; Natsuki Nemoto; Kuniaki Konishi; Ryota Takaku; Yuki Sakurai; Nobuhiko Katayama; Tomotake Matsumura; Junji Yumoto; Makoto Kuwata-Gonokami

doi:10.1109/IRMMW-THz.2019.8873935

Femtosecond Laser Processing and Evaluation of Broadband THz Anti-Reflection Structures

Haruyuki Sakurai, Natsuki Nemoto, Kuniaki Konishi, Ryota Takaku, Yuki Sakurai, Nobuhiko Katayama, Tomotake Matsumura, Junji Yumoto, Makoto Kuwata-Gonokami

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We fabricate terahertz anti-reflection structures on the surface of high-resistivity silicon via femtosecond laser processing. We measure its spectral properties by terahertz time-domain spectroscopy, and find a broadband increase in transmissivity over 0.3-2.5 THz. We investigate the observed spectral characteristics of this transmission by using numerical simulation. We successfully reproduce the observed result for all frequencies, including a previously undocumented high-frequency drop-off, when the model includes additional material losses. We believe these effects to be induced by the laser-ablation fabrication process.

Original language	English
Title of host publication	IRMMW-THz 2019 - 44th International Conference on Infrared, Millimeter, and Terahertz Waves
Publisher	IEEE Computer Society
ISBN (Electronic)	9781538682852
DOIs	https://doi.org/10.1109/IRMMW-THz.2019.8873935
Publication status	Published - Sept 2019
Externally published	Yes
Event	44th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2019 - Paris, France Duration: Sept 1 2019 → Sept 6 2019

Publication series

Name	International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz
Volume	2019-September
ISSN (Print)	2162-2027
ISSN (Electronic)	2162-2035

Conference

Conference	44th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2019
Country/Territory	France
City	Paris
Period	9/1/19 → 9/6/19

ASJC Scopus subject areas

Energy Engineering and Power Technology
Electrical and Electronic Engineering

Access to Document

10.1109/IRMMW-THz.2019.8873935

Cite this

Sakurai, H., Nemoto, N., Konishi, K., Takaku, R., Sakurai, Y., Katayama, N., Matsumura, T., Yumoto, J., & Kuwata-Gonokami, M. (2019). Femtosecond Laser Processing and Evaluation of Broadband THz Anti-Reflection Structures. In IRMMW-THz 2019 - 44th International Conference on Infrared, Millimeter, and Terahertz Waves [8873935] (International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz; Vol. 2019-September). IEEE Computer Society. https://doi.org/10.1109/IRMMW-THz.2019.8873935

Femtosecond Laser Processing and Evaluation of Broadband THz Anti-Reflection Structures. / Sakurai, Haruyuki; Nemoto, Natsuki; Konishi, Kuniaki et al.

IRMMW-THz 2019 - 44th International Conference on Infrared, Millimeter, and Terahertz Waves. IEEE Computer Society, 2019. 8873935 (International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz; Vol. 2019-September).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Sakurai, H, Nemoto, N, Konishi, K, Takaku, R, Sakurai, Y, Katayama, N, Matsumura, T, Yumoto, J & Kuwata-Gonokami, M 2019, Femtosecond Laser Processing and Evaluation of Broadband THz Anti-Reflection Structures. in IRMMW-THz 2019 - 44th International Conference on Infrared, Millimeter, and Terahertz Waves., 8873935, International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz, vol. 2019-September, IEEE Computer Society, 44th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2019, Paris, France, 9/1/19. https://doi.org/10.1109/IRMMW-THz.2019.8873935

Sakurai H, Nemoto N, Konishi K, Takaku R, Sakurai Y, Katayama N et al. Femtosecond Laser Processing and Evaluation of Broadband THz Anti-Reflection Structures. In IRMMW-THz 2019 - 44th International Conference on Infrared, Millimeter, and Terahertz Waves. IEEE Computer Society. 2019. 8873935. (International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz). doi: 10.1109/IRMMW-THz.2019.8873935

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title = "Femtosecond Laser Processing and Evaluation of Broadband THz Anti-Reflection Structures",

abstract = "We fabricate terahertz anti-reflection structures on the surface of high-resistivity silicon via femtosecond laser processing. We measure its spectral properties by terahertz time-domain spectroscopy, and find a broadband increase in transmissivity over 0.3-2.5 THz. We investigate the observed spectral characteristics of this transmission by using numerical simulation. We successfully reproduce the observed result for all frequencies, including a previously undocumented high-frequency drop-off, when the model includes additional material losses. We believe these effects to be induced by the laser-ablation fabrication process.",

author = "Haruyuki Sakurai and Natsuki Nemoto and Kuniaki Konishi and Ryota Takaku and Yuki Sakurai and Nobuhiko Katayama and Tomotake Matsumura and Junji Yumoto and Makoto Kuwata-Gonokami",

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AU - Sakurai, Haruyuki

AU - Nemoto, Natsuki

AU - Konishi, Kuniaki

AU - Takaku, Ryota

AU - Sakurai, Yuki

AU - Katayama, Nobuhiko

AU - Matsumura, Tomotake

AU - Yumoto, Junji

AU - Kuwata-Gonokami, Makoto

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N2 - We fabricate terahertz anti-reflection structures on the surface of high-resistivity silicon via femtosecond laser processing. We measure its spectral properties by terahertz time-domain spectroscopy, and find a broadband increase in transmissivity over 0.3-2.5 THz. We investigate the observed spectral characteristics of this transmission by using numerical simulation. We successfully reproduce the observed result for all frequencies, including a previously undocumented high-frequency drop-off, when the model includes additional material losses. We believe these effects to be induced by the laser-ablation fabrication process.

AB - We fabricate terahertz anti-reflection structures on the surface of high-resistivity silicon via femtosecond laser processing. We measure its spectral properties by terahertz time-domain spectroscopy, and find a broadband increase in transmissivity over 0.3-2.5 THz. We investigate the observed spectral characteristics of this transmission by using numerical simulation. We successfully reproduce the observed result for all frequencies, including a previously undocumented high-frequency drop-off, when the model includes additional material losses. We believe these effects to be induced by the laser-ablation fabrication process.

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Femtosecond Laser Processing and Evaluation of Broadband THz Anti-Reflection Structures

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