Femtosecond Laser Processing and Evaluation of Broadband THz Anti-Reflection Structures

Haruyuki Sakurai, Natsuki Nemoto, Kuniaki Konishi, Ryota Takaku, Yuki Sakurai, Nobuhiko Katayama, Tomotake Matsumura, Junji Yumoto, Makoto Kuwata-Gonokami

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We fabricate terahertz anti-reflection structures on the surface of high-resistivity silicon via femtosecond laser processing. We measure its spectral properties by terahertz time-domain spectroscopy, and find a broadband increase in transmissivity over 0.3-2.5 THz. We investigate the observed spectral characteristics of this transmission by using numerical simulation. We successfully reproduce the observed result for all frequencies, including a previously undocumented high-frequency drop-off, when the model includes additional material losses. We believe these effects to be induced by the laser-ablation fabrication process.

Original languageEnglish
Title of host publicationIRMMW-THz 2019 - 44th International Conference on Infrared, Millimeter, and Terahertz Waves
PublisherIEEE Computer Society
ISBN (Electronic)9781538682852
DOIs
Publication statusPublished - Sep 2019
Externally publishedYes
Event44th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2019 - Paris, France
Duration: Sep 1 2019Sep 6 2019

Publication series

NameInternational Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz
Volume2019-September
ISSN (Print)2162-2027
ISSN (Electronic)2162-2035

Conference

Conference44th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2019
Country/TerritoryFrance
CityParis
Period9/1/199/6/19

ASJC Scopus subject areas

  • Energy Engineering and Power Technology
  • Electrical and Electronic Engineering

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