Fabrication of micro-patterned TiO2 thin films incorporating Ag nanoparticles

Kazuya Nakata, Keizo Udagawa, Donald A. Tryk, Tsuyoshi Ochiai, Shunsuke Nishimoto, Hideki Sakai, Taketoshi Murakami, Masahiko Abe, Akira Fujishima

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

A photosensitive TiO2 thin film embedded with Ag nanoparticles has been prepared from a Ti(OBu)4-acetylacetone solution, containing dispersed Ag nanoparticles, by the sol-gel method. UV-visible absorption spectra showed that the thin film obtained has two absorption bands, characteristic of the acetylacetone chelate rings and plasmon resonance from Ag nanoparticles. After the irradiation of UV light, the absorption band from the chelate rings almost disappeared, ascribed to structural changes associated with dissociation of the chelate rings. The thin film after the UV irradiation exhibited a broad absorption band in the IR spectrum, indicating that a Ti-O-Ti network was formed in the thin film. HRTEM and EDX spectra revealed that Ag nanoparticles were present and dispersed in the TiO2 thin film. Micro-patterns of 50 μm dots have been fabricated by UV irradiation through a corresponding photomask, followed by leaching.

Original languageEnglish
Pages (from-to)1628-1630
Number of pages3
JournalMaterials Letters
Volume63
Issue number18-19
DOIs
Publication statusPublished - Jul 31 2009
Externally publishedYes

Fingerprint

Absorption spectra
Nanoparticles
Fabrication
Thin films
nanoparticles
fabrication
chelates
absorption spectra
thin films
acetylacetone
Irradiation
irradiation
rings
Photomasks
photomasks
leaching
visible spectrum
Ultraviolet radiation
Sol-gel process
Leaching

Keywords

  • Patterning
  • Silver nanoparticles
  • Sol-gel preparation
  • Thin film
  • TiO

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering
  • Mechanics of Materials

Cite this

Nakata, K., Udagawa, K., Tryk, D. A., Ochiai, T., Nishimoto, S., Sakai, H., ... Fujishima, A. (2009). Fabrication of micro-patterned TiO2 thin films incorporating Ag nanoparticles. Materials Letters, 63(18-19), 1628-1630. https://doi.org/10.1016/j.matlet.2009.04.035

Fabrication of micro-patterned TiO2 thin films incorporating Ag nanoparticles. / Nakata, Kazuya; Udagawa, Keizo; Tryk, Donald A.; Ochiai, Tsuyoshi; Nishimoto, Shunsuke; Sakai, Hideki; Murakami, Taketoshi; Abe, Masahiko; Fujishima, Akira.

In: Materials Letters, Vol. 63, No. 18-19, 31.07.2009, p. 1628-1630.

Research output: Contribution to journalArticle

Nakata, K, Udagawa, K, Tryk, DA, Ochiai, T, Nishimoto, S, Sakai, H, Murakami, T, Abe, M & Fujishima, A 2009, 'Fabrication of micro-patterned TiO2 thin films incorporating Ag nanoparticles', Materials Letters, vol. 63, no. 18-19, pp. 1628-1630. https://doi.org/10.1016/j.matlet.2009.04.035
Nakata, Kazuya ; Udagawa, Keizo ; Tryk, Donald A. ; Ochiai, Tsuyoshi ; Nishimoto, Shunsuke ; Sakai, Hideki ; Murakami, Taketoshi ; Abe, Masahiko ; Fujishima, Akira. / Fabrication of micro-patterned TiO2 thin films incorporating Ag nanoparticles. In: Materials Letters. 2009 ; Vol. 63, No. 18-19. pp. 1628-1630.
@article{cf732f1867e746b1a64e5a58a577d8e2,
title = "Fabrication of micro-patterned TiO2 thin films incorporating Ag nanoparticles",
abstract = "A photosensitive TiO2 thin film embedded with Ag nanoparticles has been prepared from a Ti(OBu)4-acetylacetone solution, containing dispersed Ag nanoparticles, by the sol-gel method. UV-visible absorption spectra showed that the thin film obtained has two absorption bands, characteristic of the acetylacetone chelate rings and plasmon resonance from Ag nanoparticles. After the irradiation of UV light, the absorption band from the chelate rings almost disappeared, ascribed to structural changes associated with dissociation of the chelate rings. The thin film after the UV irradiation exhibited a broad absorption band in the IR spectrum, indicating that a Ti-O-Ti network was formed in the thin film. HRTEM and EDX spectra revealed that Ag nanoparticles were present and dispersed in the TiO2 thin film. Micro-patterns of 50 μm dots have been fabricated by UV irradiation through a corresponding photomask, followed by leaching.",
keywords = "Patterning, Silver nanoparticles, Sol-gel preparation, Thin film, TiO",
author = "Kazuya Nakata and Keizo Udagawa and Tryk, {Donald A.} and Tsuyoshi Ochiai and Shunsuke Nishimoto and Hideki Sakai and Taketoshi Murakami and Masahiko Abe and Akira Fujishima",
year = "2009",
month = "7",
day = "31",
doi = "10.1016/j.matlet.2009.04.035",
language = "English",
volume = "63",
pages = "1628--1630",
journal = "Materials Letters",
issn = "0167-577X",
publisher = "Elsevier",
number = "18-19",

}

TY - JOUR

T1 - Fabrication of micro-patterned TiO2 thin films incorporating Ag nanoparticles

AU - Nakata, Kazuya

AU - Udagawa, Keizo

AU - Tryk, Donald A.

AU - Ochiai, Tsuyoshi

AU - Nishimoto, Shunsuke

AU - Sakai, Hideki

AU - Murakami, Taketoshi

AU - Abe, Masahiko

AU - Fujishima, Akira

PY - 2009/7/31

Y1 - 2009/7/31

N2 - A photosensitive TiO2 thin film embedded with Ag nanoparticles has been prepared from a Ti(OBu)4-acetylacetone solution, containing dispersed Ag nanoparticles, by the sol-gel method. UV-visible absorption spectra showed that the thin film obtained has two absorption bands, characteristic of the acetylacetone chelate rings and plasmon resonance from Ag nanoparticles. After the irradiation of UV light, the absorption band from the chelate rings almost disappeared, ascribed to structural changes associated with dissociation of the chelate rings. The thin film after the UV irradiation exhibited a broad absorption band in the IR spectrum, indicating that a Ti-O-Ti network was formed in the thin film. HRTEM and EDX spectra revealed that Ag nanoparticles were present and dispersed in the TiO2 thin film. Micro-patterns of 50 μm dots have been fabricated by UV irradiation through a corresponding photomask, followed by leaching.

AB - A photosensitive TiO2 thin film embedded with Ag nanoparticles has been prepared from a Ti(OBu)4-acetylacetone solution, containing dispersed Ag nanoparticles, by the sol-gel method. UV-visible absorption spectra showed that the thin film obtained has two absorption bands, characteristic of the acetylacetone chelate rings and plasmon resonance from Ag nanoparticles. After the irradiation of UV light, the absorption band from the chelate rings almost disappeared, ascribed to structural changes associated with dissociation of the chelate rings. The thin film after the UV irradiation exhibited a broad absorption band in the IR spectrum, indicating that a Ti-O-Ti network was formed in the thin film. HRTEM and EDX spectra revealed that Ag nanoparticles were present and dispersed in the TiO2 thin film. Micro-patterns of 50 μm dots have been fabricated by UV irradiation through a corresponding photomask, followed by leaching.

KW - Patterning

KW - Silver nanoparticles

KW - Sol-gel preparation

KW - Thin film

KW - TiO

UR - http://www.scopus.com/inward/record.url?scp=65749093296&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=65749093296&partnerID=8YFLogxK

U2 - 10.1016/j.matlet.2009.04.035

DO - 10.1016/j.matlet.2009.04.035

M3 - Article

AN - SCOPUS:65749093296

VL - 63

SP - 1628

EP - 1630

JO - Materials Letters

JF - Materials Letters

SN - 0167-577X

IS - 18-19

ER -