Fabrication of a low leakage current type impedance sensor with shielding structures to detect a low water content of soil for slope failure prognostics

Masato Futagawa, Shin Ogasahara, Tatsumi Ito, Mitsuru Komatsu, Yasushi Fuwa, Harutoyo Hirano, Ippei Akita, Kenichiro Kusano, Minoru Watanabe

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

A low-leakage-current-type impedance sensor chip with shield structures has been fabricated. The low limit detection of soil-water-content measurement was improved compared with that of the other semiconductor-type sensors. The shield structures were fabricated under the impedance sensor areas. To measure the weak signal current eliminated by the leakage current, we proposed a new operation circuit to separate the leakage current. Our sensor was able to measure low water content of 10% or less. The sensor could detect the change of water content in the slope of mountain when it rained.

Original languageEnglish
Pages (from-to)383-388
Number of pages6
JournalSensors and Actuators, A: Physical
Volume271
DOIs
Publication statusPublished - Mar 1 2018

Fingerprint

Leakage currents
Shielding
Water content
moisture content
shielding
soils
leakage
impedance
slopes
Soils
Fabrication
fabrication
sensors
Sensors
bedrock
mountains
chips
Semiconductor materials
Networks (circuits)

Keywords

  • Impedance sensor
  • LSI technology
  • Slope failure prognostics
  • Soil water content

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

Cite this

Fabrication of a low leakage current type impedance sensor with shielding structures to detect a low water content of soil for slope failure prognostics. / Futagawa, Masato; Ogasahara, Shin; Ito, Tatsumi; Komatsu, Mitsuru; Fuwa, Yasushi; Hirano, Harutoyo; Akita, Ippei; Kusano, Kenichiro; Watanabe, Minoru.

In: Sensors and Actuators, A: Physical, Vol. 271, 01.03.2018, p. 383-388.

Research output: Contribution to journalArticle

Futagawa, Masato ; Ogasahara, Shin ; Ito, Tatsumi ; Komatsu, Mitsuru ; Fuwa, Yasushi ; Hirano, Harutoyo ; Akita, Ippei ; Kusano, Kenichiro ; Watanabe, Minoru. / Fabrication of a low leakage current type impedance sensor with shielding structures to detect a low water content of soil for slope failure prognostics. In: Sensors and Actuators, A: Physical. 2018 ; Vol. 271. pp. 383-388.
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