Fabrication of a low leakage current type impedance sensor with shielding structures to detect a low water content of soil for slope failure prognostics

Masato Futagawa, Shin Ogasahara, Tatsumi Ito, Mitsuru Komatsu, Yasushi Fuwa, Harutoyo Hirano, Ippei Akita, Kenichiro Kusano, Minoru Watanabe

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

A low-leakage-current-type impedance sensor chip with shield structures has been fabricated. The low limit detection of soil-water-content measurement was improved compared with that of the other semiconductor-type sensors. The shield structures were fabricated under the impedance sensor areas. To measure the weak signal current eliminated by the leakage current, we proposed a new operation circuit to separate the leakage current. Our sensor was able to measure low water content of 10% or less. The sensor could detect the change of water content in the slope of mountain when it rained.

Original languageEnglish
Pages (from-to)383-388
Number of pages6
JournalSensors and Actuators, A: Physical
Volume271
DOIs
Publication statusPublished - Mar 1 2018

Keywords

  • Impedance sensor
  • LSI technology
  • Slope failure prognostics
  • Soil water content

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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