Fabrication of a low leakage current type impedance sensor to monitor soil water content for slope failure prognostics

Masato Futagawa; Shin Ogasahara; Tatsumi Ito; Mitsuru Komatsu; Yasushi Fuwa; Harutoyo Hirano; Ippei Akita; Kenichiro Kusano; Minoru Watanabe

doi:10.1109/TRANSDUCERS.2017.7994253

Fabrication of a low leakage current type impedance sensor to monitor soil water content for slope failure prognostics

Masato Futagawa, Shin Ogasahara, Tatsumi Ito, Mitsuru Komatsu, Yasushi Fuwa, Harutoyo Hirano, Ippei Akita, Kenichiro Kusano, Minoru Watanabe

Solid Waste Management Research Center

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

A low-leakage-current type impedance sensor chip with shield structures has been fabricated. The low limit detection of soil-water-content measurement was improved compared with that of the other semiconductor type sensors. The shield structures were fabricated under the impedance sensor areas. To measure weak signal current eliminated the leakage current, we proposed a new operation circuit to separate the leakage current. Our sensor achieved to measure low water content 10 % or less.

Original language	English
Title of host publication	TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1136-1139
Number of pages	4
ISBN (Electronic)	9781538627310
DOIs	https://doi.org/10.1109/TRANSDUCERS.2017.7994253
Publication status	Published - Jul 26 2017
Event	19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China Duration: Jun 18 2017 → Jun 22 2017

Other

Other	19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
Country	Taiwan, Province of China
City	Kaohsiung
Period	6/18/17 → 6/22/17

Keywords

Impedance sensor
slope failure prognostics
soil water content

ASJC Scopus subject areas

Chemical Health and Safety
Instrumentation
Electrical and Electronic Engineering

Access to Document

10.1109/TRANSDUCERS.2017.7994253

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Cite this

Futagawa, M., Ogasahara, S., Ito, T., Komatsu, M., Fuwa, Y., Hirano, H., Akita, I., Kusano, K., & Watanabe, M. (2017). Fabrication of a low leakage current type impedance sensor to monitor soil water content for slope failure prognostics. In TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 1136-1139). [7994253] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2017.7994253

Fabrication of a low leakage current type impedance sensor to monitor soil water content for slope failure prognostics. / Futagawa, Masato; Ogasahara, Shin; Ito, Tatsumi; Komatsu, Mitsuru; Fuwa, Yasushi; Hirano, Harutoyo; Akita, Ippei; Kusano, Kenichiro; Watanabe, Minoru.

TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc., 2017. p. 1136-1139 7994253.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Futagawa, M, Ogasahara, S, Ito, T, Komatsu, M, Fuwa, Y, Hirano, H, Akita, I, Kusano, K & Watanabe, M 2017, Fabrication of a low leakage current type impedance sensor to monitor soil water content for slope failure prognostics. in TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems., 7994253, Institute of Electrical and Electronics Engineers Inc., pp. 1136-1139, 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017, Kaohsiung, Taiwan, Province of China, 6/18/17. https://doi.org/10.1109/TRANSDUCERS.2017.7994253

Futagawa M, Ogasahara S, Ito T, Komatsu M, Fuwa Y, Hirano H et al. Fabrication of a low leakage current type impedance sensor to monitor soil water content for slope failure prognostics. In TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc. 2017. p. 1136-1139. 7994253 https://doi.org/10.1109/TRANSDUCERS.2017.7994253

Futagawa, Masato ; Ogasahara, Shin ; Ito, Tatsumi ; Komatsu, Mitsuru ; Fuwa, Yasushi ; Hirano, Harutoyo ; Akita, Ippei ; Kusano, Kenichiro ; Watanabe, Minoru. / Fabrication of a low leakage current type impedance sensor to monitor soil water content for slope failure prognostics. TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 1136-1139

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