Fabrication of a low leakage current type impedance sensor to monitor soil water content for slope failure prognostics

Masato Futagawa, Shin Ogasahara, Tatsumi Ito, Mitsuru Komatsu, Yasushi Fuwa, Harutoyo Hirano, Ippei Akita, Kenichiro Kusano, Minoru Watanabe

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A low-leakage-current type impedance sensor chip with shield structures has been fabricated. The low limit detection of soil-water-content measurement was improved compared with that of the other semiconductor type sensors. The shield structures were fabricated under the impedance sensor areas. To measure weak signal current eliminated the leakage current, we proposed a new operation circuit to separate the leakage current. Our sensor achieved to measure low water content 10 % or less.

Original languageEnglish
Title of host publicationTRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1136-1139
Number of pages4
ISBN (Electronic)9781538627310
DOIs
Publication statusPublished - Jul 26 2017
Event19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China
Duration: Jun 18 2017Jun 22 2017

Other

Other19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017
CountryTaiwan, Province of China
CityKaohsiung
Period6/18/176/22/17

Keywords

  • Impedance sensor
  • slope failure prognostics
  • soil water content

ASJC Scopus subject areas

  • Chemical Health and Safety
  • Instrumentation
  • Electrical and Electronic Engineering

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  • Cite this

    Futagawa, M., Ogasahara, S., Ito, T., Komatsu, M., Fuwa, Y., Hirano, H., Akita, I., Kusano, K., & Watanabe, M. (2017). Fabrication of a low leakage current type impedance sensor to monitor soil water content for slope failure prognostics. In TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 1136-1139). [7994253] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2017.7994253