Abstract
A low-leakage-current type impedance sensor chip with shield structures has been fabricated. The low limit detection of soil-water-content measurement was improved compared with that of the other semiconductor type sensors. The shield structures were fabricated under the impedance sensor areas. To measure weak signal current eliminated the leakage current, we proposed a new operation circuit to separate the leakage current. Our sensor achieved to measure low water content 10 % or less.
| Original language | English |
|---|---|
| Title of host publication | TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 1136-1139 |
| Number of pages | 4 |
| ISBN (Electronic) | 9781538627310 |
| DOIs | |
| Publication status | Published - Jul 26 2017 |
| Event | 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China Duration: Jun 18 2017 → Jun 22 2017 |
Other
| Other | 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 |
|---|---|
| Country | Taiwan, Province of China |
| City | Kaohsiung |
| Period | 6/18/17 → 6/22/17 |
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Keywords
- Impedance sensor
- slope failure prognostics
- soil water content
ASJC Scopus subject areas
- Chemical Health and Safety
- Instrumentation
- Electrical and Electronic Engineering
Cite this
Fabrication of a low leakage current type impedance sensor to monitor soil water content for slope failure prognostics. / Futagawa, Masato; Ogasahara, Shin; Ito, Tatsumi; Komatsu, Mitsuru; Fuwa, Yasushi; Hirano, Harutoyo; Akita, Ippei; Kusano, Kenichiro; Watanabe, Minoru.
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems. Institute of Electrical and Electronics Engineers Inc., 2017. p. 1136-1139 7994253.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Fabrication of a low leakage current type impedance sensor to monitor soil water content for slope failure prognostics
AU - Futagawa, Masato
AU - Ogasahara, Shin
AU - Ito, Tatsumi
AU - Komatsu, Mitsuru
AU - Fuwa, Yasushi
AU - Hirano, Harutoyo
AU - Akita, Ippei
AU - Kusano, Kenichiro
AU - Watanabe, Minoru
PY - 2017/7/26
Y1 - 2017/7/26
N2 - A low-leakage-current type impedance sensor chip with shield structures has been fabricated. The low limit detection of soil-water-content measurement was improved compared with that of the other semiconductor type sensors. The shield structures were fabricated under the impedance sensor areas. To measure weak signal current eliminated the leakage current, we proposed a new operation circuit to separate the leakage current. Our sensor achieved to measure low water content 10 % or less.
AB - A low-leakage-current type impedance sensor chip with shield structures has been fabricated. The low limit detection of soil-water-content measurement was improved compared with that of the other semiconductor type sensors. The shield structures were fabricated under the impedance sensor areas. To measure weak signal current eliminated the leakage current, we proposed a new operation circuit to separate the leakage current. Our sensor achieved to measure low water content 10 % or less.
KW - Impedance sensor
KW - slope failure prognostics
KW - soil water content
UR - http://www.scopus.com/inward/record.url?scp=85029387900&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85029387900&partnerID=8YFLogxK
U2 - 10.1109/TRANSDUCERS.2017.7994253
DO - 10.1109/TRANSDUCERS.2017.7994253
M3 - Conference contribution
AN - SCOPUS:85029387900
SP - 1136
EP - 1139
BT - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
PB - Institute of Electrical and Electronics Engineers Inc.
ER -