Abstract
A low-leakage-current type impedance sensor chip with shield structures has been fabricated. The low limit detection of soil-water-content measurement was improved compared with that of the other semiconductor type sensors. The shield structures were fabricated under the impedance sensor areas. To measure weak signal current eliminated the leakage current, we proposed a new operation circuit to separate the leakage current. Our sensor achieved to measure low water content 10 % or less.
Original language | English |
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Title of host publication | TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
Pages | 1136-1139 |
Number of pages | 4 |
ISBN (Electronic) | 9781538627310 |
DOIs | |
Publication status | Published - Jul 26 2017 |
Event | 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 - Kaohsiung, Taiwan, Province of China Duration: Jun 18 2017 → Jun 22 2017 |
Other
Other | 19th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2017 |
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Country | Taiwan, Province of China |
City | Kaohsiung |
Period | 6/18/17 → 6/22/17 |
Keywords
- Impedance sensor
- slope failure prognostics
- soil water content
ASJC Scopus subject areas
- Chemical Health and Safety
- Instrumentation
- Electrical and Electronic Engineering