Fabrication of 5-GHz-band SAW filter with atomically-flat-surface AlN on sapphire

K. Uehara, C. M. Yang, T. Shibata, S. K. Kim, S. Kameda, H. Nakase, K. Tsubouchi

Research output: Contribution to journalConference article

29 Citations (Scopus)

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Engineering & Materials Science