Fabrication of 5-GHz-band SAW filter with atomically-flat-surface AlN on sapphire

K. Uehara, C. M. Yang, T. Shibata, S. K. Kim, S. Kameda, H. Nakase, K. Tsubouchi

Research output: Contribution to journalConference article

29 Citations (Scopus)

Abstract

5-GHz-band surface acoustic wave (SAW) filters for mobile communication were fabricated on atomically-flat-surface (0001)aluminum nitride/(0001)sapphire (AlN/Al2O3) combination. The SAW devices were fabricated using electron beam lithography and lift-off method. Atomically-flat-surface AlN films were used to reduce SAW propagation loss. Center frequency of the fabricated SAW filter was 5.18 GHz. SAW velocity was 5688 m/s at normalized thickness by wave number (kH) of 9.9. Effective coupling coefficient was 0.1 % and temperature-coefficient of delay was 9ppm/°C at kH of 5.9. SAW propagation loss was 0.0053 dB at 5.18 GHz. The atomically-flat-surface (0001)AlN/(0001)Al2O3 combination is promised to be used for 5-GHz-band SAW filter for the application to mobile communication.

Original languageEnglish
Pages (from-to)203-206
Number of pages4
JournalProceedings - IEEE Ultrasonics Symposium
Volume1
Publication statusPublished - Dec 1 2004
Externally publishedYes
Event2004 IEEE Ultrasonics Symposium - Montreal, Que., Canada
Duration: Aug 23 2004Aug 27 2004

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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    Uehara, K., Yang, C. M., Shibata, T., Kim, S. K., Kameda, S., Nakase, H., & Tsubouchi, K. (2004). Fabrication of 5-GHz-band SAW filter with atomically-flat-surface AlN on sapphire. Proceedings - IEEE Ultrasonics Symposium, 1, 203-206.