Fabrication of 5-GHz-band SAW filter with atomically-flat-surface AlN on sapphire

Kazuhiro Uehara, C. M. Yang, T. Shibata, S. K. Kim, S. Kameda, H. Nakase, K. Tsubouchi

Research output: Contribution to journalArticle

26 Citations (Scopus)

Abstract

5-GHz-band surface acoustic wave (SAW) filters for mobile communication were fabricated on atomically-flat-surface (0001)aluminum nitride/(0001)sapphire (AlN/Al2O3) combination. The SAW devices were fabricated using electron beam lithography and lift-off method. Atomically-flat-surface AlN films were used to reduce SAW propagation loss. Center frequency of the fabricated SAW filter was 5.18 GHz. SAW velocity was 5688 m/s at normalized thickness by wave number (kH) of 9.9. Effective coupling coefficient was 0.1 % and temperature-coefficient of delay was 9ppm/°C at kH of 5.9. SAW propagation loss was 0.0053 dB at 5.18 GHz. The atomically-flat-surface (0001)AlN/(0001)Al2O3 combination is promised to be used for 5-GHz-band SAW filter for the application to mobile communication.

Original languageEnglish
Pages (from-to)203-206
Number of pages4
JournalUnknown Journal
Volume1
Publication statusPublished - 2004
Externally publishedYes

Fingerprint

Acoustic surface wave filters
Sapphire
Surface waves
Acoustic wave propagation
Fabrication
Acoustic surface wave devices
Aluminum nitride
Electron beam lithography
Communication
Acoustic wave velocity
Temperature

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Uehara, K., Yang, C. M., Shibata, T., Kim, S. K., Kameda, S., Nakase, H., & Tsubouchi, K. (2004). Fabrication of 5-GHz-band SAW filter with atomically-flat-surface AlN on sapphire. Unknown Journal, 1, 203-206.

Fabrication of 5-GHz-band SAW filter with atomically-flat-surface AlN on sapphire. / Uehara, Kazuhiro; Yang, C. M.; Shibata, T.; Kim, S. K.; Kameda, S.; Nakase, H.; Tsubouchi, K.

In: Unknown Journal, Vol. 1, 2004, p. 203-206.

Research output: Contribution to journalArticle

Uehara, K, Yang, CM, Shibata, T, Kim, SK, Kameda, S, Nakase, H & Tsubouchi, K 2004, 'Fabrication of 5-GHz-band SAW filter with atomically-flat-surface AlN on sapphire', Unknown Journal, vol. 1, pp. 203-206.
Uehara K, Yang CM, Shibata T, Kim SK, Kameda S, Nakase H et al. Fabrication of 5-GHz-band SAW filter with atomically-flat-surface AlN on sapphire. Unknown Journal. 2004;1:203-206.
Uehara, Kazuhiro ; Yang, C. M. ; Shibata, T. ; Kim, S. K. ; Kameda, S. ; Nakase, H. ; Tsubouchi, K. / Fabrication of 5-GHz-band SAW filter with atomically-flat-surface AlN on sapphire. In: Unknown Journal. 2004 ; Vol. 1. pp. 203-206.
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AU - Kim, S. K.

AU - Kameda, S.

AU - Nakase, H.

AU - Tsubouchi, K.

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