Fabrication method for icoriented si singleelectron transistors

Yukinori Ono, Yasuo Takahashi, Kenji Yamazaki, Masao Nagase, Hideo Namatsu, Kenji Kurihara, Katsumi Murase

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

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Physics & Astronomy

Chemical Compounds

Engineering & Materials Science