Fabrication method for IC-oriented Si twin-island single-electron transistors

Yukinori Ono, Yasuo Takahashi, Kenji Yamazaki, Masao Nagase, Hideo Namatsu, Kenji Kurihara, Katsumi Murase

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Citations (Scopus)

Abstract

A new fabrication method for Si single-electron transistors (SETs) is proposed. The method enables us to fabricate, in a self-aligned way, a twin-island SET in which two Si islands are aligned in parallel. Experimental devices demonstrated, at 40 K, that the twin-island SET structure can be operated as two individual SETs. Since the two SETs are packed in a tiny area, this method is suitable for constructing logic circuits based on pass-transistor-type logic and CMOS-type logic, which promises to lead to single-electron logic LSIs.

Original languageEnglish
Title of host publicationTechnical Digest - International Electron Devices Meeting
Editors Anon
PublisherIEEE
Pages123-126
Number of pages4
Publication statusPublished - 1998
Externally publishedYes
EventProceedings of the 1998 IEEE International Electron Devices Meeting - San Francisco, CA, USA
Duration: Dec 6 1998Dec 9 1998

Other

OtherProceedings of the 1998 IEEE International Electron Devices Meeting
CitySan Francisco, CA, USA
Period12/6/9812/9/98

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ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Ono, Y., Takahashi, Y., Yamazaki, K., Nagase, M., Namatsu, H., Kurihara, K., & Murase, K. (1998). Fabrication method for IC-oriented Si twin-island single-electron transistors. In Anon (Ed.), Technical Digest - International Electron Devices Meeting (pp. 123-126). IEEE.