Fabrication method for IC-oriented Si single-electron transistors

Yukinori Ono, Yasuo Takahashi, Kenji Yamazaki, Masao Nagase, Hideo Namatsu, Kenji Kurihara, Katsumi Murase

Research output: Contribution to journalArticlepeer-review

93 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds