Fabrication and application of two-axis hall sensor array using ELO film bonding technology

Keishin Koh, Seok Beom Kim, Koji Hohkawa

Research output: Contribution to journalArticle

Abstract

In this paper, we report a basic study on the development of a two-axis Hall sensor array using epitaxial lift-off (ELO) film bonding technology. We developed a novel Hall sensor array fabricated on a Si substrate that can directly measure axial and radial magnetic field components (Bx and Bz) simultaneously. We investigated conditions of basic fabrication process and fabricated a basic test device. We also estimated basic characteristics of the Hall sensor and measured the DC self-magnetic field profiles of a YBCO strip. The results clarified that the ELO film bonding technology is suitable for fabricating two-axis Hall sensor array.

Original languageEnglish
Pages (from-to)3773-3776
Number of pages4
JournalIEEE Transactions on Applied Superconductivity
Volume17
Issue number2
DOIs
Publication statusPublished - Jun 1 2007

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Keywords

  • Bonding
  • Hall effect devices
  • Semiconductor devices fabrication
  • Superconducting materials measurement

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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