Fabrication and application of two-axis hall sensor array using ELO film bonding technology

Keishin Koh, Seok Beom Kim, Koji Hohkawa

Research output: Contribution to journalArticle

Abstract

In this paper, we report a basic study on the development of a two-axis Hall sensor array using epitaxial lift-off (ELO) film bonding technology. We developed a novel Hall sensor array fabricated on a Si substrate that can directly measure axial and radial magnetic field components (Bx and Bz) simultaneously. We investigated conditions of basic fabrication process and fabricated a basic test device. We also estimated basic characteristics of the Hall sensor and measured the DC self-magnetic field profiles of a YBCO strip. The results clarified that the ELO film bonding technology is suitable for fabricating two-axis Hall sensor array.

Original languageEnglish
Pages (from-to)3773-3776
Number of pages4
JournalIEEE Transactions on Applied Superconductivity
Volume17
Issue number2
DOIs
Publication statusPublished - Jun 2007

Fingerprint

Sensor arrays
Fabrication
fabrication
sensors
Magnetic fields
magnetic fields
strip
direct current
Sensors
Substrates
profiles

Keywords

  • Bonding
  • Hall effect devices
  • Semiconductor devices fabrication
  • Superconducting materials measurement

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Physics and Astronomy (miscellaneous)

Cite this

Fabrication and application of two-axis hall sensor array using ELO film bonding technology. / Koh, Keishin; Kim, Seok Beom; Hohkawa, Koji.

In: IEEE Transactions on Applied Superconductivity, Vol. 17, No. 2, 06.2007, p. 3773-3776.

Research output: Contribution to journalArticle

@article{05211ae27fc24a5a97e9cca5e0a736e5,
title = "Fabrication and application of two-axis hall sensor array using ELO film bonding technology",
abstract = "In this paper, we report a basic study on the development of a two-axis Hall sensor array using epitaxial lift-off (ELO) film bonding technology. We developed a novel Hall sensor array fabricated on a Si substrate that can directly measure axial and radial magnetic field components (Bx and Bz) simultaneously. We investigated conditions of basic fabrication process and fabricated a basic test device. We also estimated basic characteristics of the Hall sensor and measured the DC self-magnetic field profiles of a YBCO strip. The results clarified that the ELO film bonding technology is suitable for fabricating two-axis Hall sensor array.",
keywords = "Bonding, Hall effect devices, Semiconductor devices fabrication, Superconducting materials measurement",
author = "Keishin Koh and Kim, {Seok Beom} and Koji Hohkawa",
year = "2007",
month = "6",
doi = "10.1109/TASC.2007.899041",
language = "English",
volume = "17",
pages = "3773--3776",
journal = "IEEE Transactions on Applied Superconductivity",
issn = "1051-8223",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "2",

}

TY - JOUR

T1 - Fabrication and application of two-axis hall sensor array using ELO film bonding technology

AU - Koh, Keishin

AU - Kim, Seok Beom

AU - Hohkawa, Koji

PY - 2007/6

Y1 - 2007/6

N2 - In this paper, we report a basic study on the development of a two-axis Hall sensor array using epitaxial lift-off (ELO) film bonding technology. We developed a novel Hall sensor array fabricated on a Si substrate that can directly measure axial and radial magnetic field components (Bx and Bz) simultaneously. We investigated conditions of basic fabrication process and fabricated a basic test device. We also estimated basic characteristics of the Hall sensor and measured the DC self-magnetic field profiles of a YBCO strip. The results clarified that the ELO film bonding technology is suitable for fabricating two-axis Hall sensor array.

AB - In this paper, we report a basic study on the development of a two-axis Hall sensor array using epitaxial lift-off (ELO) film bonding technology. We developed a novel Hall sensor array fabricated on a Si substrate that can directly measure axial and radial magnetic field components (Bx and Bz) simultaneously. We investigated conditions of basic fabrication process and fabricated a basic test device. We also estimated basic characteristics of the Hall sensor and measured the DC self-magnetic field profiles of a YBCO strip. The results clarified that the ELO film bonding technology is suitable for fabricating two-axis Hall sensor array.

KW - Bonding

KW - Hall effect devices

KW - Semiconductor devices fabrication

KW - Superconducting materials measurement

UR - http://www.scopus.com/inward/record.url?scp=34547481970&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=34547481970&partnerID=8YFLogxK

U2 - 10.1109/TASC.2007.899041

DO - 10.1109/TASC.2007.899041

M3 - Article

VL - 17

SP - 3773

EP - 3776

JO - IEEE Transactions on Applied Superconductivity

JF - IEEE Transactions on Applied Superconductivity

SN - 1051-8223

IS - 2

ER -