Fabrication and application of two-axis hall sensor array using ELO film bonding technology

Keishin Koh; Seok Beom Kim; Koji Hohkawa

doi:10.1109/TASC.2007.899041

Fabrication and application of two-axis hall sensor array using ELO film bonding technology

Keishin Koh, Seok Beom Kim, Koji Hohkawa

Research output: Contribution to journal › Article › peer-review

Abstract

In this paper, we report a basic study on the development of a two-axis Hall sensor array using epitaxial lift-off (ELO) film bonding technology. We developed a novel Hall sensor array fabricated on a Si substrate that can directly measure axial and radial magnetic field components (Bx and Bz) simultaneously. We investigated conditions of basic fabrication process and fabricated a basic test device. We also estimated basic characteristics of the Hall sensor and measured the DC self-magnetic field profiles of a YBCO strip. The results clarified that the ELO film bonding technology is suitable for fabricating two-axis Hall sensor array.

Original language	English
Pages (from-to)	3773-3776
Number of pages	4
Journal	IEEE Transactions on Applied Superconductivity
Volume	17
Issue number	2
DOIs	https://doi.org/10.1109/TASC.2007.899041
Publication status	Published - Jun 2007

Keywords

Bonding
Hall effect devices
Semiconductor devices fabrication
Superconducting materials measurement

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Electrical and Electronic Engineering

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10.1109/TASC.2007.899041

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title = "Fabrication and application of two-axis hall sensor array using ELO film bonding technology",

abstract = "In this paper, we report a basic study on the development of a two-axis Hall sensor array using epitaxial lift-off (ELO) film bonding technology. We developed a novel Hall sensor array fabricated on a Si substrate that can directly measure axial and radial magnetic field components (Bx and Bz) simultaneously. We investigated conditions of basic fabrication process and fabricated a basic test device. We also estimated basic characteristics of the Hall sensor and measured the DC self-magnetic field profiles of a YBCO strip. The results clarified that the ELO film bonding technology is suitable for fabricating two-axis Hall sensor array.",

keywords = "Bonding, Hall effect devices, Semiconductor devices fabrication, Superconducting materials measurement",

author = "Keishin Koh and Kim, {Seok Beom} and Koji Hohkawa",

note = "Funding Information: Manuscript received August 29, 2006. This work was supported in part by fund for Advance Technology Center from the Ministry of Education, Culture, Sports, Science and Technology. K. Koh and K. Hohkawa are with the Department of Electrical and Electronic Engineering, Kanagawa Institute of Technology, Atsugi, Japan (e-mail: koh@ele.kanagawa-it.ac.jp). S. B. Kim is with the Department of Electrical and Electronic Engineering, Okayama University, Okayama, Japan. Color versions of one or more of the figures in this paper are available online at http://ieeexplore.ieee.org. Digital Object Identifier 10.1109/TASC.2007.899041 Fig. 1. ELO film bonding technology. (a) Etching of sacrifice layer; (b) bond GaAs film on the other sub.",

year = "2007",

month = jun,

doi = "10.1109/TASC.2007.899041",

language = "English",

volume = "17",

pages = "3773--3776",

journal = "IEEE Transactions on Applied Superconductivity",

issn = "1051-8223",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

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T1 - Fabrication and application of two-axis hall sensor array using ELO film bonding technology

AU - Koh, Keishin

AU - Kim, Seok Beom

AU - Hohkawa, Koji

N1 - Funding Information: Manuscript received August 29, 2006. This work was supported in part by fund for Advance Technology Center from the Ministry of Education, Culture, Sports, Science and Technology. K. Koh and K. Hohkawa are with the Department of Electrical and Electronic Engineering, Kanagawa Institute of Technology, Atsugi, Japan (e-mail: koh@ele.kanagawa-it.ac.jp). S. B. Kim is with the Department of Electrical and Electronic Engineering, Okayama University, Okayama, Japan. Color versions of one or more of the figures in this paper are available online at http://ieeexplore.ieee.org. Digital Object Identifier 10.1109/TASC.2007.899041 Fig. 1. ELO film bonding technology. (a) Etching of sacrifice layer; (b) bond GaAs film on the other sub.

PY - 2007/6

Y1 - 2007/6

N2 - In this paper, we report a basic study on the development of a two-axis Hall sensor array using epitaxial lift-off (ELO) film bonding technology. We developed a novel Hall sensor array fabricated on a Si substrate that can directly measure axial and radial magnetic field components (Bx and Bz) simultaneously. We investigated conditions of basic fabrication process and fabricated a basic test device. We also estimated basic characteristics of the Hall sensor and measured the DC self-magnetic field profiles of a YBCO strip. The results clarified that the ELO film bonding technology is suitable for fabricating two-axis Hall sensor array.

AB - In this paper, we report a basic study on the development of a two-axis Hall sensor array using epitaxial lift-off (ELO) film bonding technology. We developed a novel Hall sensor array fabricated on a Si substrate that can directly measure axial and radial magnetic field components (Bx and Bz) simultaneously. We investigated conditions of basic fabrication process and fabricated a basic test device. We also estimated basic characteristics of the Hall sensor and measured the DC self-magnetic field profiles of a YBCO strip. The results clarified that the ELO film bonding technology is suitable for fabricating two-axis Hall sensor array.

KW - Bonding

KW - Hall effect devices

KW - Semiconductor devices fabrication

KW - Superconducting materials measurement

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Fabrication and application of two-axis hall sensor array using ELO film bonding technology

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