Evaluation of the sensitivity of hydrogen sensors covered with polytetrafluoroethylene as a protective membrane for humidity

Koji Fujii, Hirotsugu Inoue, Tomiharu Yamaguchi, Toshihiko Kiwa, Keiji Tsukada

Research output: Contribution to journalArticle

Abstract

Environmental factors such as dust adsorption effects and humidity generally result in drifts of the sensor output signal and lead tomalfunctions of the sensor and/or reduction in sensitivity. So a sensor package is necessary to protect hydrogen sensors in order to operate the sensors in an actual use environment. In this study, a Pt-FET hydrogen sensor covered with a polytetrafluoroethylene (PTFE) porous membrane was developed. The PTFE porous membrane with different pore sizes of 5 μm, 20 μm A and 30 μm was applied and the effects of humidity on sensor sensitivity were evaluated. The results indicate the effects of humidity on the sensitivity were reduced in the relative humidity range between 20% and 80% for the sensor with the 5-μm porous membrane.

Original languageEnglish
Pages (from-to)401-406
Number of pages6
JournalIEEJ Transactions on Sensors and Micromachines
Volume130
Issue number8
DOIs
Publication statusPublished - Sep 28 2010

Keywords

  • Hydrogen sensor
  • PTFE porous membrane
  • Packaging
  • Pt-FET

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

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