Evaluation of the sensitivity of hydrogen sensors covered with polytetrafluoroethylene as a protective membrane for humidity

Koji Fujii; Hirotsugu Inoue; Tomiharu Yamaguchi; Toshihiko Kiwa; Keiji Tsukada

doi:10.1541/ieejsmas.130.401

Evaluation of the sensitivity of hydrogen sensors covered with polytetrafluoroethylene as a protective membrane for humidity

Koji Fujii, Hirotsugu Inoue, Tomiharu Yamaguchi, Toshihiko Kiwa, Keiji Tsukada

Research output: Contribution to journal › Article › peer-review

Abstract

Environmental factors such as dust adsorption effects and humidity generally result in drifts of the sensor output signal and lead tomalfunctions of the sensor and/or reduction in sensitivity. So a sensor package is necessary to protect hydrogen sensors in order to operate the sensors in an actual use environment. In this study, a Pt-FET hydrogen sensor covered with a polytetrafluoroethylene (PTFE) porous membrane was developed. The PTFE porous membrane with different pore sizes of 5 μm, 20 μm A and 30 μm was applied and the effects of humidity on sensor sensitivity were evaluated. The results indicate the effects of humidity on the sensitivity were reduced in the relative humidity range between 20% and 80% for the sensor with the 5-μm porous membrane.

Original language	English
Pages (from-to)	401-406
Number of pages	6
Journal	IEEJ Transactions on Sensors and Micromachines
Volume	130
Issue number	8
DOIs	https://doi.org/10.1541/ieejsmas.130.401
Publication status	Published - 2010

Keywords

Hydrogen sensor
PTFE porous membrane
Packaging
Pt-FET

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering

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abstract = "Environmental factors such as dust adsorption effects and humidity generally result in drifts of the sensor output signal and lead tomalfunctions of the sensor and/or reduction in sensitivity. So a sensor package is necessary to protect hydrogen sensors in order to operate the sensors in an actual use environment. In this study, a Pt-FET hydrogen sensor covered with a polytetrafluoroethylene (PTFE) porous membrane was developed. The PTFE porous membrane with different pore sizes of 5 μm, 20 μm A and 30 μm was applied and the effects of humidity on sensor sensitivity were evaluated. The results indicate the effects of humidity on the sensitivity were reduced in the relative humidity range between 20% and 80% for the sensor with the 5-μm porous membrane.",

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AU - Fujii, Koji

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AU - Kiwa, Toshihiko

AU - Tsukada, Keiji

PY - 2010

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AB - Environmental factors such as dust adsorption effects and humidity generally result in drifts of the sensor output signal and lead tomalfunctions of the sensor and/or reduction in sensitivity. So a sensor package is necessary to protect hydrogen sensors in order to operate the sensors in an actual use environment. In this study, a Pt-FET hydrogen sensor covered with a polytetrafluoroethylene (PTFE) porous membrane was developed. The PTFE porous membrane with different pore sizes of 5 μm, 20 μm A and 30 μm was applied and the effects of humidity on sensor sensitivity were evaluated. The results indicate the effects of humidity on the sensitivity were reduced in the relative humidity range between 20% and 80% for the sensor with the 5-μm porous membrane.

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