TY - GEN
T1 - Evaluation of the catalytic metal for the hydrogen sensor using terahertz chemical microscope
AU - Sugimoto, Takeshi
AU - Kondo, Yosuke
AU - Kiwa, Toshihiko
AU - Kawayama, Iwao
AU - Tonouchi, Masayoshi
AU - Tsukada, Keiji
PY - 2009/12/31
Y1 - 2009/12/31
N2 - To develop the hydrogen sensor, the chemical potential due to the catalytic reaction of the metals are required to evaluate. The platinum and titanium layered electrode on the insulator/semiconductor layered device are fabricated as the test chip. The catalytic reaction of platinum and hydrogen gas were successfully visualized.
AB - To develop the hydrogen sensor, the chemical potential due to the catalytic reaction of the metals are required to evaluate. The platinum and titanium layered electrode on the insulator/semiconductor layered device are fabricated as the test chip. The catalytic reaction of platinum and hydrogen gas were successfully visualized.
UR - http://www.scopus.com/inward/record.url?scp=72749085625&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=72749085625&partnerID=8YFLogxK
U2 - 10.1109/ICIMW.2009.5325729
DO - 10.1109/ICIMW.2009.5325729
M3 - Conference contribution
AN - SCOPUS:72749085625
SN - 9781424454174
T3 - 34th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2009
BT - 34th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2009
T2 - 34th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2009
Y2 - 21 September 2009 through 25 September 2009
ER -