Evaluation of the catalytic metal for the hydrogen sensor using terahertz chemical microscope

Takeshi Sugimoto, Yosuke Kondo, Toshihiko Kiwa, Iwao Kawayama, Masayoshi Tonouchi, Keiji Tsukada

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

To develop the hydrogen sensor, the chemical potential due to the catalytic reaction of the metals are required to evaluate. The platinum and titanium layered electrode on the insulator/semiconductor layered device are fabricated as the test chip. The catalytic reaction of platinum and hydrogen gas were successfully visualized.

Original languageEnglish
Title of host publication34th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2009
DOIs
Publication statusPublished - Dec 31 2009
Event34th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2009 - Busan, Korea, Republic of
Duration: Sep 21 2009Sep 25 2009

Publication series

Name34th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2009

Other

Other34th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2009
CountryKorea, Republic of
CityBusan
Period9/21/099/25/09

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Communication

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  • Cite this

    Sugimoto, T., Kondo, Y., Kiwa, T., Kawayama, I., Tonouchi, M., & Tsukada, K. (2009). Evaluation of the catalytic metal for the hydrogen sensor using terahertz chemical microscope. In 34th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2009 [5325729] (34th International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz 2009). https://doi.org/10.1109/ICIMW.2009.5325729