@inproceedings{18ef60a04c4245c993997765cd0a9a29,
title = "Evaluation of surface damage of organic films due to irradiation with energetic ion beams",
abstract = "The surface of L-leucine films irradiated with an Ar5000 cluster ion beam (5 keV) was characterized by using the X-ray reflective (XRR) measurement method, atomic force microscopy (AFM) and ellipsometry. No significant damage was detected on the surface of the L-leucine films irradiated with the Ar cluster ion beam. Therefore, the large cluster-low-energy (about 1 eV/atom) beam would be suitable for low-damage etching of organic materials.",
keywords = "Ar cluster, damage evaluation, organic material, surface roughness",
author = "Masaki Hada and Yusaku Hontani and Sachi Ibuki and Kazuya Ichiki and Satoshi Ninomiya and Toshio Seki and Takaaki Aoki and Jiro Matsuo",
year = "2010",
month = dec,
day = "1",
doi = "10.1063/1.3548390",
language = "English",
isbn = "9780735408760",
series = "AIP Conference Proceedings",
pages = "314--316",
booktitle = "Ion Implantation Technology 2010 - 18th International Conference on Ion Implantation Technology, IIT 2010",
note = "18th International Conference on Ion Implantation Technology, IIT 2010 ; Conference date: 06-06-2010 Through 11-06-2010",
}