Evaluation of surface damage of organic films due to irradiation with energetic ion beams

Masaki Hada; Yusaku Hontani; Sachi Ibuki; Kazuya Ichiki; Satoshi Ninomiya; Toshio Seki; Takaaki Aoki; Jiro Matsuo

doi:10.1063/1.3548390

Evaluation of surface damage of organic films due to irradiation with energetic ion beams

Masaki Hada, Yusaku Hontani, Sachi Ibuki, Kazuya Ichiki, Satoshi Ninomiya, Toshio Seki, Takaaki Aoki, Jiro Matsuo

Graduate School of Natural Science and Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

The surface of L-leucine films irradiated with an Ar₅₀₀₀ cluster ion beam (5 keV) was characterized by using the X-ray reflective (XRR) measurement method, atomic force microscopy (AFM) and ellipsometry. No significant damage was detected on the surface of the L-leucine films irradiated with the Ar cluster ion beam. Therefore, the large cluster-low-energy (about 1 eV/atom) beam would be suitable for low-damage etching of organic materials.

Original language	English
Title of host publication	Ion Implantation Technology 2010 - 18th International Conference on Ion Implantation Technology, IIT 2010
Pages	314-316
Number of pages	3
DOIs	https://doi.org/10.1063/1.3548390
Publication status	Published - Dec 1 2010
Event	18th International Conference on Ion Implantation Technology, IIT 2010 - Kyoto, Japan Duration: Jun 6 2010 → Jun 11 2010

Publication series

Name	AIP Conference Proceedings
Volume	1321
ISSN (Print)	0094-243X
ISSN (Electronic)	1551-7616

Other

Other	18th International Conference on Ion Implantation Technology, IIT 2010
Country/Territory	Japan
City	Kyoto
Period	6/6/10 → 6/11/10

Keywords

Ar cluster
damage evaluation
organic material
surface roughness

ASJC Scopus subject areas

Physics and Astronomy(all)

Access to Document

10.1063/1.3548390

Cite this

Hada, M., Hontani, Y., Ibuki, S., Ichiki, K., Ninomiya, S., Seki, T., Aoki, T., & Matsuo, J. (2010). Evaluation of surface damage of organic films due to irradiation with energetic ion beams. In Ion Implantation Technology 2010 - 18th International Conference on Ion Implantation Technology, IIT 2010 (pp. 314-316). (AIP Conference Proceedings; Vol. 1321). https://doi.org/10.1063/1.3548390

Evaluation of surface damage of organic films due to irradiation with energetic ion beams. / Hada, Masaki; Hontani, Yusaku; Ibuki, Sachi et al.

Ion Implantation Technology 2010 - 18th International Conference on Ion Implantation Technology, IIT 2010. 2010. p. 314-316 (AIP Conference Proceedings; Vol. 1321).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Hada, M, Hontani, Y, Ibuki, S, Ichiki, K, Ninomiya, S, Seki, T, Aoki, T & Matsuo, J 2010, Evaluation of surface damage of organic films due to irradiation with energetic ion beams. in Ion Implantation Technology 2010 - 18th International Conference on Ion Implantation Technology, IIT 2010. AIP Conference Proceedings, vol. 1321, pp. 314-316, 18th International Conference on Ion Implantation Technology, IIT 2010, Kyoto, Japan, 6/6/10. https://doi.org/10.1063/1.3548390

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title = "Evaluation of surface damage of organic films due to irradiation with energetic ion beams",

abstract = "The surface of L-leucine films irradiated with an Ar5000 cluster ion beam (5 keV) was characterized by using the X-ray reflective (XRR) measurement method, atomic force microscopy (AFM) and ellipsometry. No significant damage was detected on the surface of the L-leucine films irradiated with the Ar cluster ion beam. Therefore, the large cluster-low-energy (about 1 eV/atom) beam would be suitable for low-damage etching of organic materials.",

keywords = "Ar cluster, damage evaluation, organic material, surface roughness",

author = "Masaki Hada and Yusaku Hontani and Sachi Ibuki and Kazuya Ichiki and Satoshi Ninomiya and Toshio Seki and Takaaki Aoki and Jiro Matsuo",

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AU - Hada, Masaki

AU - Hontani, Yusaku

AU - Ibuki, Sachi

AU - Ichiki, Kazuya

AU - Ninomiya, Satoshi

AU - Seki, Toshio

AU - Aoki, Takaaki

AU - Matsuo, Jiro

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N2 - The surface of L-leucine films irradiated with an Ar5000 cluster ion beam (5 keV) was characterized by using the X-ray reflective (XRR) measurement method, atomic force microscopy (AFM) and ellipsometry. No significant damage was detected on the surface of the L-leucine films irradiated with the Ar cluster ion beam. Therefore, the large cluster-low-energy (about 1 eV/atom) beam would be suitable for low-damage etching of organic materials.

AB - The surface of L-leucine films irradiated with an Ar5000 cluster ion beam (5 keV) was characterized by using the X-ray reflective (XRR) measurement method, atomic force microscopy (AFM) and ellipsometry. No significant damage was detected on the surface of the L-leucine films irradiated with the Ar cluster ion beam. Therefore, the large cluster-low-energy (about 1 eV/atom) beam would be suitable for low-damage etching of organic materials.

KW - Ar cluster

KW - damage evaluation

KW - organic material

KW - surface roughness

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Evaluation of surface damage of organic films due to irradiation with energetic ion beams

Abstract

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