Evaluation of spatial resolution in Laser-Terahertz emission microscope for inspecting electric faults in integrated circuits

Masatsugu Yamashita, Toshihiko Kiwa, Masayoshi Tonouchi, Kodo Kawase

Research output: Contribution to journalConference article

1 Citation (Scopus)

Abstract

We have proposed and demonstrated a nondestructive and non-contact inspection method for electrical faults using laser-Terahertz (THz) emission microscopy (LTEM). By measuring the position dependence of the amplitude of the THz emission from integrated circuits (IC) excited with femtosecond (fs) laser pulses, it is possible to investigate the electrical faults in IC. By improving the spatial resolution of the system, we successfully observed the THz emission image of a microprocessor on standby mode. The LTEM system has a spatial resolution about 3μm and it can localize electrically defective sites in the chip to within a ten square microns.

Original languageEnglish
Pages (from-to)104-111
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5354
DOIs
Publication statusPublished - Jul 6 2004
Externally publishedYes
EventTerahertz and Gigahertz Electronics and Photonics III - San Jose, CA, United States
Duration: Jan 25 2004Jan 26 2004

Keywords

  • Electrical faults
  • Femtosecond laser
  • IC inspection
  • THz emission

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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