Evaluation of spatial resolution in Laser-Terahertz emission microscope for inspecting electric faults in integrated circuits

Masatsugu Yamashita; Toshihiko Kiwa; Masayoshi Tonouchi; Kodo Kawase

doi:10.1117/12.528833

Evaluation of spatial resolution in Laser-Terahertz emission microscope for inspecting electric faults in integrated circuits

Masatsugu Yamashita, Toshihiko Kiwa, Masayoshi Tonouchi, Kodo Kawase

Research output: Contribution to journal › Conference article

1 Citation (Scopus)

Abstract

We have proposed and demonstrated a nondestructive and non-contact inspection method for electrical faults using laser-Terahertz (THz) emission microscopy (LTEM). By measuring the position dependence of the amplitude of the THz emission from integrated circuits (IC) excited with femtosecond (fs) laser pulses, it is possible to investigate the electrical faults in IC. By improving the spatial resolution of the system, we successfully observed the THz emission image of a microprocessor on standby mode. The LTEM system has a spatial resolution about 3μm and it can localize electrically defective sites in the chip to within a ten square microns.

Original language	English
Pages (from-to)	104-111
Number of pages	8
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5354
DOIs	https://doi.org/10.1117/12.528833
Publication status	Published - Jul 6 2004
Externally published	Yes
Event	Terahertz and Gigahertz Electronics and Photonics III - San Jose, CA, United States Duration: Jan 25 2004 → Jan 26 2004

Keywords

Electrical faults
Femtosecond laser
IC inspection
THz emission

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.528833

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Evaluation of spatial resolution in Laser-Terahertz emission microscope for inspecting electric faults in integrated circuits. / Yamashita, Masatsugu; Kiwa, Toshihiko; Tonouchi, Masayoshi; Kawase, Kodo.

In: Proceedings of SPIE - The International Society for Optical Engineering, Vol. 5354, 06.07.2004, p. 104-111.

Research output: Contribution to journal › Conference article

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abstract = "We have proposed and demonstrated a nondestructive and non-contact inspection method for electrical faults using laser-Terahertz (THz) emission microscopy (LTEM). By measuring the position dependence of the amplitude of the THz emission from integrated circuits (IC) excited with femtosecond (fs) laser pulses, it is possible to investigate the electrical faults in IC. By improving the spatial resolution of the system, we successfully observed the THz emission image of a microprocessor on standby mode. The LTEM system has a spatial resolution about 3μm and it can localize electrically defective sites in the chip to within a ten square microns.",

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AU - Tonouchi, Masayoshi

AU - Kawase, Kodo

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N2 - We have proposed and demonstrated a nondestructive and non-contact inspection method for electrical faults using laser-Terahertz (THz) emission microscopy (LTEM). By measuring the position dependence of the amplitude of the THz emission from integrated circuits (IC) excited with femtosecond (fs) laser pulses, it is possible to investigate the electrical faults in IC. By improving the spatial resolution of the system, we successfully observed the THz emission image of a microprocessor on standby mode. The LTEM system has a spatial resolution about 3μm and it can localize electrically defective sites in the chip to within a ten square microns.

AB - We have proposed and demonstrated a nondestructive and non-contact inspection method for electrical faults using laser-Terahertz (THz) emission microscopy (LTEM). By measuring the position dependence of the amplitude of the THz emission from integrated circuits (IC) excited with femtosecond (fs) laser pulses, it is possible to investigate the electrical faults in IC. By improving the spatial resolution of the system, we successfully observed the THz emission image of a microprocessor on standby mode. The LTEM system has a spatial resolution about 3μm and it can localize electrically defective sites in the chip to within a ten square microns.

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KW - Femtosecond laser

KW - IC inspection

KW - THz emission

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