Evaluation of spatial resolution in Laser-Terahertz emission microscope for inspecting electric faults in integrated circuits

Masatsugu Yamashita, Toshihiko Kiwa, Masayoshi Tonouchi, Kodo Kawase

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We have proposed and demonstrated a nondestructive and non-contact inspection method for electrical faults using laser-Terahertz (THz) emission microscopy (LTEM). By measuring the position dependence of the amplitude of the THz emission from integrated circuits (IC) excited with femtosecond (fs) laser pulses, it is possible to investigate the electrical faults in IC. By improving the spatial resolution of the system, we successfully observed the THz emission image of a microprocessor on standby mode. The LTEM system has a spatial resolution about 3μm and it can localize electrically defective sites in the chip to within a ten square microns.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsR.J. Hwu
Pages104-111
Number of pages8
Volume5354
DOIs
Publication statusPublished - 2004
Externally publishedYes
EventTerahertz and Gigahertz Electronics and Photonics III - San Jose, CA, United States
Duration: Jan 25 2004Jan 26 2004

Other

OtherTerahertz and Gigahertz Electronics and Photonics III
CountryUnited States
CitySan Jose, CA
Period1/25/041/26/04

Fingerprint

Electric fault currents
integrated circuits
Integrated circuits
Microscopic examination
Microscopes
spatial resolution
microscopes
Lasers
evaluation
Laser modes
Ultrashort pulses
electrical faults
lasers
Microprocessor chips
Inspection
microscopy
microprocessors
inspection
chips
pulses

Keywords

  • Electrical faults
  • Femtosecond laser
  • IC inspection
  • THz emission

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Yamashita, M., Kiwa, T., Tonouchi, M., & Kawase, K. (2004). Evaluation of spatial resolution in Laser-Terahertz emission microscope for inspecting electric faults in integrated circuits. In R. J. Hwu (Ed.), Proceedings of SPIE - The International Society for Optical Engineering (Vol. 5354, pp. 104-111) https://doi.org/10.1117/12.528833

Evaluation of spatial resolution in Laser-Terahertz emission microscope for inspecting electric faults in integrated circuits. / Yamashita, Masatsugu; Kiwa, Toshihiko; Tonouchi, Masayoshi; Kawase, Kodo.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / R.J. Hwu. Vol. 5354 2004. p. 104-111.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yamashita, M, Kiwa, T, Tonouchi, M & Kawase, K 2004, Evaluation of spatial resolution in Laser-Terahertz emission microscope for inspecting electric faults in integrated circuits. in RJ Hwu (ed.), Proceedings of SPIE - The International Society for Optical Engineering. vol. 5354, pp. 104-111, Terahertz and Gigahertz Electronics and Photonics III, San Jose, CA, United States, 1/25/04. https://doi.org/10.1117/12.528833
Yamashita M, Kiwa T, Tonouchi M, Kawase K. Evaluation of spatial resolution in Laser-Terahertz emission microscope for inspecting electric faults in integrated circuits. In Hwu RJ, editor, Proceedings of SPIE - The International Society for Optical Engineering. Vol. 5354. 2004. p. 104-111 https://doi.org/10.1117/12.528833
Yamashita, Masatsugu ; Kiwa, Toshihiko ; Tonouchi, Masayoshi ; Kawase, Kodo. / Evaluation of spatial resolution in Laser-Terahertz emission microscope for inspecting electric faults in integrated circuits. Proceedings of SPIE - The International Society for Optical Engineering. editor / R.J. Hwu. Vol. 5354 2004. pp. 104-111
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