Abstract
We have proposed and demonstrated a nondestructive and non-contact inspection method for electrical faults using laser-Terahertz (THz) emission microscopy (LTEM). By measuring the position dependence of the amplitude of the THz emission from integrated circuits (IC) excited with femtosecond (fs) laser pulses, it is possible to investigate the electrical faults in IC. By improving the spatial resolution of the system, we successfully observed the THz emission image of a microprocessor on standby mode. The LTEM system has a spatial resolution about 3μm and it can localize electrically defective sites in the chip to within a ten square microns.
| Original language | English |
|---|---|
| Pages (from-to) | 104-111 |
| Number of pages | 8 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 5354 |
| DOIs | |
| Publication status | Published - Jul 6 2004 |
| Externally published | Yes |
| Event | Terahertz and Gigahertz Electronics and Photonics III - San Jose, CA, United States Duration: Jan 25 2004 → Jan 26 2004 |
Keywords
- Electrical faults
- Femtosecond laser
- IC inspection
- THz emission
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering
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Cite this
Yamashita, M., Kiwa, T., Tonouchi, M., & Kawase, K. (2004). Evaluation of spatial resolution in Laser-Terahertz emission microscope for inspecting electric faults in integrated circuits. Proceedings of SPIE - The International Society for Optical Engineering, 5354, 104-111. https://doi.org/10.1117/12.528833