Abstract
We have proposed and demonstrated a nondestructive and non-contact inspection method for electrical faults using laser-Terahertz (THz) emission microscopy (LTEM). By measuring the position dependence of the amplitude of the THz emission from integrated circuits (IC) excited with femtosecond (fs) laser pulses, it is possible to investigate the electrical faults in IC. By improving the spatial resolution of the system, we successfully observed the THz emission image of a microprocessor on standby mode. The LTEM system has a spatial resolution about 3μm and it can localize electrically defective sites in the chip to within a ten square microns.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of SPIE - The International Society for Optical Engineering |
| Editors | R.J. Hwu |
| Pages | 104-111 |
| Number of pages | 8 |
| Volume | 5354 |
| DOIs | |
| Publication status | Published - 2004 |
| Externally published | Yes |
| Event | Terahertz and Gigahertz Electronics and Photonics III - San Jose, CA, United States Duration: Jan 25 2004 → Jan 26 2004 |
Other
| Other | Terahertz and Gigahertz Electronics and Photonics III |
|---|---|
| Country | United States |
| City | San Jose, CA |
| Period | 1/25/04 → 1/26/04 |
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Keywords
- Electrical faults
- Femtosecond laser
- IC inspection
- THz emission
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Condensed Matter Physics
Cite this
Evaluation of spatial resolution in Laser-Terahertz emission microscope for inspecting electric faults in integrated circuits. / Yamashita, Masatsugu; Kiwa, Toshihiko; Tonouchi, Masayoshi; Kawase, Kodo.
Proceedings of SPIE - The International Society for Optical Engineering. ed. / R.J. Hwu. Vol. 5354 2004. p. 104-111.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Evaluation of spatial resolution in Laser-Terahertz emission microscope for inspecting electric faults in integrated circuits
AU - Yamashita, Masatsugu
AU - Kiwa, Toshihiko
AU - Tonouchi, Masayoshi
AU - Kawase, Kodo
PY - 2004
Y1 - 2004
N2 - We have proposed and demonstrated a nondestructive and non-contact inspection method for electrical faults using laser-Terahertz (THz) emission microscopy (LTEM). By measuring the position dependence of the amplitude of the THz emission from integrated circuits (IC) excited with femtosecond (fs) laser pulses, it is possible to investigate the electrical faults in IC. By improving the spatial resolution of the system, we successfully observed the THz emission image of a microprocessor on standby mode. The LTEM system has a spatial resolution about 3μm and it can localize electrically defective sites in the chip to within a ten square microns.
AB - We have proposed and demonstrated a nondestructive and non-contact inspection method for electrical faults using laser-Terahertz (THz) emission microscopy (LTEM). By measuring the position dependence of the amplitude of the THz emission from integrated circuits (IC) excited with femtosecond (fs) laser pulses, it is possible to investigate the electrical faults in IC. By improving the spatial resolution of the system, we successfully observed the THz emission image of a microprocessor on standby mode. The LTEM system has a spatial resolution about 3μm and it can localize electrically defective sites in the chip to within a ten square microns.
KW - Electrical faults
KW - Femtosecond laser
KW - IC inspection
KW - THz emission
UR - http://www.scopus.com/inward/record.url?scp=3042599919&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=3042599919&partnerID=8YFLogxK
U2 - 10.1117/12.528833
DO - 10.1117/12.528833
M3 - Conference contribution
AN - SCOPUS:3042599919
VL - 5354
SP - 104
EP - 111
BT - Proceedings of SPIE - The International Society for Optical Engineering
A2 - Hwu, R.J.
ER -