Evaluation of damaged region at the groove edge of TCO film in pulsed fiber laser processing

Yasuhiro Okamoto, Naoya Takahashi, Shin Ichi Nakashiba, Tomokazu Sakagawa, Akira Okada

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Nonosecond pulsed fiber laser has been widely used for the removal of TCO film, because of its compact oscillator with the flexible processing head. However, the wide bandwidth of wavelength from the fiber laser would deteriorate the edge quality of groove such as cracks and burrs at the resolidified region due to the chromatic aberration. Therefore, the edge quality of scribed groove was experimentally investigated in the removal process of TCO film by the nanosecond pulsed fiber laser of 1060nm in wavelength. The damaged region such as cracks and burrs at the edge of groove could be improved by using achromatic focusing lenses. The singlet lens for focusing optics led to the large damaged region at the edge of groove, and the cracks and burrs appeared remarkably with increasing the pulse energy. The combination of singlet focusing lens and a circle mask to trim the laser beam made it possible to become the damaged region smaller, since the intensity distribution of laser beam could be sharpen at the edge by using the mask with an appropriate diameter hole.

Original languageEnglish
Title of host publicationICALEO 2012 - 31st International Congress on Applications of Lasers and Electro-Optics
Pages860-865
Number of pages6
Publication statusPublished - 2012
Event31st International Congress on Applications of Lasers and Electro-Optics, ICALEO 2012 - Anaheim, CA, United States
Duration: Sep 23 2012Sep 27 2012

Other

Other31st International Congress on Applications of Lasers and Electro-Optics, ICALEO 2012
CountryUnited States
CityAnaheim, CA
Period9/23/129/27/12

Fingerprint

Fiber lasers
Pulsed lasers
Lenses
Cracks
Laser beams
Masks
Processing
Wavelength
Aberrations
Optics
Bandwidth

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Okamoto, Y., Takahashi, N., Nakashiba, S. I., Sakagawa, T., & Okada, A. (2012). Evaluation of damaged region at the groove edge of TCO film in pulsed fiber laser processing. In ICALEO 2012 - 31st International Congress on Applications of Lasers and Electro-Optics (pp. 860-865)

Evaluation of damaged region at the groove edge of TCO film in pulsed fiber laser processing. / Okamoto, Yasuhiro; Takahashi, Naoya; Nakashiba, Shin Ichi; Sakagawa, Tomokazu; Okada, Akira.

ICALEO 2012 - 31st International Congress on Applications of Lasers and Electro-Optics. 2012. p. 860-865.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Okamoto, Y, Takahashi, N, Nakashiba, SI, Sakagawa, T & Okada, A 2012, Evaluation of damaged region at the groove edge of TCO film in pulsed fiber laser processing. in ICALEO 2012 - 31st International Congress on Applications of Lasers and Electro-Optics. pp. 860-865, 31st International Congress on Applications of Lasers and Electro-Optics, ICALEO 2012, Anaheim, CA, United States, 9/23/12.
Okamoto Y, Takahashi N, Nakashiba SI, Sakagawa T, Okada A. Evaluation of damaged region at the groove edge of TCO film in pulsed fiber laser processing. In ICALEO 2012 - 31st International Congress on Applications of Lasers and Electro-Optics. 2012. p. 860-865
Okamoto, Yasuhiro ; Takahashi, Naoya ; Nakashiba, Shin Ichi ; Sakagawa, Tomokazu ; Okada, Akira. / Evaluation of damaged region at the groove edge of TCO film in pulsed fiber laser processing. ICALEO 2012 - 31st International Congress on Applications of Lasers and Electro-Optics. 2012. pp. 860-865
@inproceedings{b9cf4124f2564605aee269a0e50d8983,
title = "Evaluation of damaged region at the groove edge of TCO film in pulsed fiber laser processing",
abstract = "Nonosecond pulsed fiber laser has been widely used for the removal of TCO film, because of its compact oscillator with the flexible processing head. However, the wide bandwidth of wavelength from the fiber laser would deteriorate the edge quality of groove such as cracks and burrs at the resolidified region due to the chromatic aberration. Therefore, the edge quality of scribed groove was experimentally investigated in the removal process of TCO film by the nanosecond pulsed fiber laser of 1060nm in wavelength. The damaged region such as cracks and burrs at the edge of groove could be improved by using achromatic focusing lenses. The singlet lens for focusing optics led to the large damaged region at the edge of groove, and the cracks and burrs appeared remarkably with increasing the pulse energy. The combination of singlet focusing lens and a circle mask to trim the laser beam made it possible to become the damaged region smaller, since the intensity distribution of laser beam could be sharpen at the edge by using the mask with an appropriate diameter hole.",
author = "Yasuhiro Okamoto and Naoya Takahashi and Nakashiba, {Shin Ichi} and Tomokazu Sakagawa and Akira Okada",
year = "2012",
language = "English",
pages = "860--865",
booktitle = "ICALEO 2012 - 31st International Congress on Applications of Lasers and Electro-Optics",

}

TY - GEN

T1 - Evaluation of damaged region at the groove edge of TCO film in pulsed fiber laser processing

AU - Okamoto, Yasuhiro

AU - Takahashi, Naoya

AU - Nakashiba, Shin Ichi

AU - Sakagawa, Tomokazu

AU - Okada, Akira

PY - 2012

Y1 - 2012

N2 - Nonosecond pulsed fiber laser has been widely used for the removal of TCO film, because of its compact oscillator with the flexible processing head. However, the wide bandwidth of wavelength from the fiber laser would deteriorate the edge quality of groove such as cracks and burrs at the resolidified region due to the chromatic aberration. Therefore, the edge quality of scribed groove was experimentally investigated in the removal process of TCO film by the nanosecond pulsed fiber laser of 1060nm in wavelength. The damaged region such as cracks and burrs at the edge of groove could be improved by using achromatic focusing lenses. The singlet lens for focusing optics led to the large damaged region at the edge of groove, and the cracks and burrs appeared remarkably with increasing the pulse energy. The combination of singlet focusing lens and a circle mask to trim the laser beam made it possible to become the damaged region smaller, since the intensity distribution of laser beam could be sharpen at the edge by using the mask with an appropriate diameter hole.

AB - Nonosecond pulsed fiber laser has been widely used for the removal of TCO film, because of its compact oscillator with the flexible processing head. However, the wide bandwidth of wavelength from the fiber laser would deteriorate the edge quality of groove such as cracks and burrs at the resolidified region due to the chromatic aberration. Therefore, the edge quality of scribed groove was experimentally investigated in the removal process of TCO film by the nanosecond pulsed fiber laser of 1060nm in wavelength. The damaged region such as cracks and burrs at the edge of groove could be improved by using achromatic focusing lenses. The singlet lens for focusing optics led to the large damaged region at the edge of groove, and the cracks and burrs appeared remarkably with increasing the pulse energy. The combination of singlet focusing lens and a circle mask to trim the laser beam made it possible to become the damaged region smaller, since the intensity distribution of laser beam could be sharpen at the edge by using the mask with an appropriate diameter hole.

UR - http://www.scopus.com/inward/record.url?scp=84893152405&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84893152405&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84893152405

SP - 860

EP - 865

BT - ICALEO 2012 - 31st International Congress on Applications of Lasers and Electro-Optics

ER -