Abstract
Nonosecond pulsed fiber laser has been widely used for the removal of TCO film, because of its compact oscillator with the flexible processing head. However, the wide bandwidth of wavelength from the fiber laser would deteriorate the edge quality of groove such as cracks and burrs at the resolidified region due to the chromatic aberration. Therefore, the edge quality of scribed groove was experimentally investigated in the removal process of TCO film by the nanosecond pulsed fiber laser of 1060nm in wavelength. The damaged region such as cracks and burrs at the edge of groove could be improved by using achromatic focusing lenses. The singlet lens for focusing optics led to the large damaged region at the edge of groove, and the cracks and burrs appeared remarkably with increasing the pulse energy. The combination of singlet focusing lens and a circle mask to trim the laser beam made it possible to become the damaged region smaller, since the intensity distribution of laser beam could be sharpen at the edge by using the mask with an appropriate diameter hole.
| Original language | English |
|---|---|
| Title of host publication | ICALEO 2012 - 31st International Congress on Applications of Lasers and Electro-Optics |
| Pages | 860-865 |
| Number of pages | 6 |
| Publication status | Published - 2012 |
| Event | 31st International Congress on Applications of Lasers and Electro-Optics, ICALEO 2012 - Anaheim, CA, United States Duration: Sep 23 2012 → Sep 27 2012 |
Other
| Other | 31st International Congress on Applications of Lasers and Electro-Optics, ICALEO 2012 |
|---|---|
| Country | United States |
| City | Anaheim, CA |
| Period | 9/23/12 → 9/27/12 |
Fingerprint
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
Cite this
Evaluation of damaged region at the groove edge of TCO film in pulsed fiber laser processing. / Okamoto, Yasuhiro; Takahashi, Naoya; Nakashiba, Shin Ichi; Sakagawa, Tomokazu; Okada, Akira.
ICALEO 2012 - 31st International Congress on Applications of Lasers and Electro-Optics. 2012. p. 860-865.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Evaluation of damaged region at the groove edge of TCO film in pulsed fiber laser processing
AU - Okamoto, Yasuhiro
AU - Takahashi, Naoya
AU - Nakashiba, Shin Ichi
AU - Sakagawa, Tomokazu
AU - Okada, Akira
PY - 2012
Y1 - 2012
N2 - Nonosecond pulsed fiber laser has been widely used for the removal of TCO film, because of its compact oscillator with the flexible processing head. However, the wide bandwidth of wavelength from the fiber laser would deteriorate the edge quality of groove such as cracks and burrs at the resolidified region due to the chromatic aberration. Therefore, the edge quality of scribed groove was experimentally investigated in the removal process of TCO film by the nanosecond pulsed fiber laser of 1060nm in wavelength. The damaged region such as cracks and burrs at the edge of groove could be improved by using achromatic focusing lenses. The singlet lens for focusing optics led to the large damaged region at the edge of groove, and the cracks and burrs appeared remarkably with increasing the pulse energy. The combination of singlet focusing lens and a circle mask to trim the laser beam made it possible to become the damaged region smaller, since the intensity distribution of laser beam could be sharpen at the edge by using the mask with an appropriate diameter hole.
AB - Nonosecond pulsed fiber laser has been widely used for the removal of TCO film, because of its compact oscillator with the flexible processing head. However, the wide bandwidth of wavelength from the fiber laser would deteriorate the edge quality of groove such as cracks and burrs at the resolidified region due to the chromatic aberration. Therefore, the edge quality of scribed groove was experimentally investigated in the removal process of TCO film by the nanosecond pulsed fiber laser of 1060nm in wavelength. The damaged region such as cracks and burrs at the edge of groove could be improved by using achromatic focusing lenses. The singlet lens for focusing optics led to the large damaged region at the edge of groove, and the cracks and burrs appeared remarkably with increasing the pulse energy. The combination of singlet focusing lens and a circle mask to trim the laser beam made it possible to become the damaged region smaller, since the intensity distribution of laser beam could be sharpen at the edge by using the mask with an appropriate diameter hole.
UR - http://www.scopus.com/inward/record.url?scp=84893152405&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84893152405&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84893152405
SP - 860
EP - 865
BT - ICALEO 2012 - 31st International Congress on Applications of Lasers and Electro-Optics
ER -