Evaluation of Charging Model in Negative-Ion Implantation

Yoshitaka Toyota, Hiroshi Tsuji, Shoji Nagumo, Shigeki Sakai, Yasuhito Gotoh, Junzo Ishikawa, Koji Matsuda

Research output: Contribution to journalArticle

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)224-227
Number of pages4
JournalShinku
Volume38
Issue number3
DOIs
Publication statusPublished - 1995
Externally publishedYes

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Ion implantation
negative ions
charging
ion implantation
Negative ions
evaluation

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cite this

Toyota, Y., Tsuji, H., Nagumo, S., Sakai, S., Gotoh, Y., Ishikawa, J., & Matsuda, K. (1995). Evaluation of Charging Model in Negative-Ion Implantation. Shinku, 38(3), 224-227. https://doi.org/10.3131/jvsj.38.224

Evaluation of Charging Model in Negative-Ion Implantation. / Toyota, Yoshitaka; Tsuji, Hiroshi; Nagumo, Shoji; Sakai, Shigeki; Gotoh, Yasuhito; Ishikawa, Junzo; Matsuda, Koji.

In: Shinku, Vol. 38, No. 3, 1995, p. 224-227.

Research output: Contribution to journalArticle

Toyota, Y, Tsuji, H, Nagumo, S, Sakai, S, Gotoh, Y, Ishikawa, J & Matsuda, K 1995, 'Evaluation of Charging Model in Negative-Ion Implantation', Shinku, vol. 38, no. 3, pp. 224-227. https://doi.org/10.3131/jvsj.38.224
Toyota Y, Tsuji H, Nagumo S, Sakai S, Gotoh Y, Ishikawa J et al. Evaluation of Charging Model in Negative-Ion Implantation. Shinku. 1995;38(3):224-227. https://doi.org/10.3131/jvsj.38.224
Toyota, Yoshitaka ; Tsuji, Hiroshi ; Nagumo, Shoji ; Sakai, Shigeki ; Gotoh, Yasuhito ; Ishikawa, Junzo ; Matsuda, Koji. / Evaluation of Charging Model in Negative-Ion Implantation. In: Shinku. 1995 ; Vol. 38, No. 3. pp. 224-227.
@article{e3f854efb82546fb9b161d95f4815d8d,
title = "Evaluation of Charging Model in Negative-Ion Implantation",
author = "Yoshitaka Toyota and Hiroshi Tsuji and Shoji Nagumo and Shigeki Sakai and Yasuhito Gotoh and Junzo Ishikawa and Koji Matsuda",
year = "1995",
doi = "10.3131/jvsj.38.224",
language = "English",
volume = "38",
pages = "224--227",
journal = "Journal of the Vacuum Society of Japan",
issn = "1882-2398",
publisher = "Vacuum Society of Japan",
number = "3",

}

TY - JOUR

T1 - Evaluation of Charging Model in Negative-Ion Implantation

AU - Toyota, Yoshitaka

AU - Tsuji, Hiroshi

AU - Nagumo, Shoji

AU - Sakai, Shigeki

AU - Gotoh, Yasuhito

AU - Ishikawa, Junzo

AU - Matsuda, Koji

PY - 1995

Y1 - 1995

UR - http://www.scopus.com/inward/record.url?scp=85009638052&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85009638052&partnerID=8YFLogxK

U2 - 10.3131/jvsj.38.224

DO - 10.3131/jvsj.38.224

M3 - Article

VL - 38

SP - 224

EP - 227

JO - Journal of the Vacuum Society of Japan

JF - Journal of the Vacuum Society of Japan

SN - 1882-2398

IS - 3

ER -