Evaluation of Charging Model in Negative-Ion Implantation

Yoshitaka Toyota, Hiroshi Tsuji, Shoji Nagumo, Shigeki Sakai, Yasuhito Gotoh, Junzo Ishikawa, Koji Matsuda

Research output: Contribution to journalArticle

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)224-227
Number of pages4
JournalShinku
Volume38
Issue number3
DOIs
Publication statusPublished - 1995
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cite this

Toyota, Y., Tsuji, H., Nagumo, S., Sakai, S., Gotoh, Y., Ishikawa, J., & Matsuda, K. (1995). Evaluation of Charging Model in Negative-Ion Implantation. Shinku, 38(3), 224-227. https://doi.org/10.3131/jvsj.38.224