Evaluation of Charging Model in Negative-Ion Implantation

Yoshitaka Toyota; Hiroshi Tsuji; Shoji Nagumo; Shigeki Sakai; Yasuhito Gotoh; Junzo Ishikawa; Koji Matsuda

doi:10.3131/jvsj.38.224

Evaluation of Charging Model in Negative-Ion Implantation

Yoshitaka Toyota, Hiroshi Tsuji, Shoji Nagumo, Shigeki Sakai, Yasuhito Gotoh, Junzo Ishikawa, Koji Matsuda

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	224-227
Number of pages	4
Journal	Shinku
Volume	38
Issue number	3
DOIs	https://doi.org/10.3131/jvsj.38.224
Publication status	Published - 1995
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

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10.3131/jvsj.38.224

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title = "Evaluation of Charging Model in Negative-Ion Implantation",

author = "Yoshitaka Toyota and Hiroshi Tsuji and Shoji Nagumo and Shigeki Sakai and Yasuhito Gotoh and Junzo Ishikawa and Koji Matsuda",

year = "1995",

doi = "10.3131/jvsj.38.224",

language = "English",

volume = "38",

pages = "224--227",

journal = "Shinku",

issn = "0559-8516",

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T1 - Evaluation of Charging Model in Negative-Ion Implantation

AU - Toyota, Yoshitaka

AU - Tsuji, Hiroshi

AU - Nagumo, Shoji

AU - Sakai, Shigeki

AU - Gotoh, Yasuhito

AU - Ishikawa, Junzo

AU - Matsuda, Koji

PY - 1995

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DO - 10.3131/jvsj.38.224

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SN - 0559-8516

VL - 38

SP - 224

EP - 227

JO - Shinku

JF - Shinku

IS - 3

ER -

Evaluation of Charging Model in Negative-Ion Implantation

ASJC Scopus subject areas

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