Estimations on high energy ions and neutral particles from LPP EUV light sources

H. Furukawa, T. Kawamura, Takeshi Nishikawa, A. Sasaki, K. Fujima, S. Fujioka, H. Nishimura, K. Nishihara, N. Miyanaga, Y. Izawa, C. Yamanaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We have developed an integrated Laser Ablation Fluid RAdiation simulation Code (LAFRAC) to estimate the behaviors of highly energetic ions and neutral particles from LPP EUV light sources, and estimated recombination and charge transfer processes between the particles from laser-produced Xe EUV light sources. We clarify that charge transfer effects greatly affect on the number density of neutral particles, especially high energy ( more than roughly 500 eV ) neutral particles.

Original languageEnglish
Title of host publicationProgress in Biomedical Optics and Imaging - Proceedings of SPIE
EditorsR.S. Mackay
Pages789-797
Number of pages9
Volume5751
EditionII
DOIs
Publication statusPublished - 2005
EventEmerging Lithographic Technologies IX - San Jose, CA, United States
Duration: Mar 1 2005Mar 3 2005

Other

OtherEmerging Lithographic Technologies IX
CountryUnited States
CitySan Jose, CA
Period3/1/053/3/05

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Keywords

  • EUV light sources
  • Highly energetic ions
  • Laser-produced plasmas
  • Neutral particles

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Furukawa, H., Kawamura, T., Nishikawa, T., Sasaki, A., Fujima, K., Fujioka, S., Nishimura, H., Nishihara, K., Miyanaga, N., Izawa, Y., & Yamanaka, C. (2005). Estimations on high energy ions and neutral particles from LPP EUV light sources. In R. S. Mackay (Ed.), Progress in Biomedical Optics and Imaging - Proceedings of SPIE (II ed., Vol. 5751, pp. 789-797). [93] https://doi.org/10.1117/12.597959