Estimations on high energy ions and neutral particles from LPP EUV light sources

H. Furukawa, T. Kawamura, T. Nishikawa, A. Sasaki, K. Fujima, S. Fujioka, H. Nishimura, K. Nishihara, N. Miyanaga, Y. Izawa, C. Yamanaka

Research output: Contribution to journalConference article

Abstract

We have developed an integrated Laser Ablation Fluid RAdiation simulation Code (LAFRAC) to estimate the behaviors of highly energetic ions and neutral particles from LPP EUV light sources, and estimated recombination and charge transfer processes between the particles from laser-produced Xe EUV light sources. We clarify that charge transfer effects greatly affect on the number density of neutral particles, especially high energy ( more than roughly 500 eV ) neutral particles.

Original languageEnglish
Article number93
Pages (from-to)789-797
Number of pages9
JournalProgress in Biomedical Optics and Imaging - Proceedings of SPIE
Volume5751
Issue numberII
DOIs
Publication statusPublished - Sep 19 2005
EventEmerging Lithographic Technologies IX - San Jose, CA, United States
Duration: Mar 1 2005Mar 3 2005

Keywords

  • EUV light sources
  • Highly energetic ions
  • Laser-produced plasmas
  • Neutral particles

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Biomaterials
  • Atomic and Molecular Physics, and Optics
  • Radiology Nuclear Medicine and imaging

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    Furukawa, H., Kawamura, T., Nishikawa, T., Sasaki, A., Fujima, K., Fujioka, S., Nishimura, H., Nishihara, K., Miyanaga, N., Izawa, Y., & Yamanaka, C. (2005). Estimations on high energy ions and neutral particles from LPP EUV light sources. Progress in Biomedical Optics and Imaging - Proceedings of SPIE, 5751(II), 789-797. [93]. https://doi.org/10.1117/12.597959