Estimation of resolution and contact force of a longitudinally vibrating touch probe sensor using lead zirconate titanate (PZT) thin-film vibrator

Takefumi Kanda, Takeshi Morita, Minoru K. Kurosawa, Toshiro Higuchi

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

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Physics & Astronomy

Engineering & Materials Science