Estimation of resolution and contact force of a longitudinally vibrating touch probe sensor using lead zirconate titanate (PZT) thin-film vibrator

Takefumi Kanda, Takeshi Morita, Minoru K. Kurosawa, Toshiro Higuchi

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

In this paper, the evaluation of the sensitivity, resolution, and contact force of a touch probe sensor device for higher sensitivity and low contact force is reported. Our goal in designing our touch probe sensor was to realize high-resolution, low-contact-force, wide-scanning-area up to mm scale square, and quick-scanning surface profile measurement. The sensitivity and resolution of our touch probe sensor were 2.0 × 10-2 mV/nm and 2.4 nm, respectively. Although this resolution depends on the noise level, the noise level of the pre-amplifier circuit was much larger than that of the vibrator. By minimizing the noise of the circuit by using low-noise-type operational amplifiers, higher resolution up to 0.2 nm can be obtained. Although the contact force was estimated to be 25 μN under a 0.3 Vp-p driving voltage, it will be 300 nN when using a low-noise circuit.

Original languageEnglish
Pages (from-to)3646-3651
Number of pages6
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume40
Issue number5 B
DOIs
Publication statusPublished - May 2001
Externally publishedYes

Keywords

  • Contact force
  • Hydrothermal method
  • PZT thin film
  • Piezoelectric transducer
  • Resolution
  • Surface profile measurement
  • Touch probe sensor
  • Ultrasonic vibrator

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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