Abstract
In this paper, the evaluation of the sensitivity, resolution, and contact force of a touch probe sensor device for higher sensitivity and low contact force is reported. Our goal in designing our touch probe sensor was to realize high-resolution, low-contact-force, wide-scanning-area up to mm scale square, and quick-scanning surface profile measurement. The sensitivity and resolution of our touch probe sensor were 2.0 × 10-2 mV/nm and 2.4 nm, respectively. Although this resolution depends on the noise level, the noise level of the pre-amplifier circuit was much larger than that of the vibrator. By minimizing the noise of the circuit by using low-noise-type operational amplifiers, higher resolution up to 0.2 nm can be obtained. Although the contact force was estimated to be 25 μN under a 0.3 Vp-p driving voltage, it will be 300 nN when using a low-noise circuit.
| Original language | English |
|---|---|
| Pages (from-to) | 3646-3651 |
| Number of pages | 6 |
| Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| Volume | 40 |
| Issue number | 5 B |
| DOIs | |
| Publication status | Published - May 2001 |
| Externally published | Yes |
Keywords
- Contact force
- Hydrothermal method
- PZT thin film
- Piezoelectric transducer
- Resolution
- Surface profile measurement
- Touch probe sensor
- Ultrasonic vibrator
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)