Estimation of hydrothermally deposited lead zirconate titanate (PZT) thin-film

Takefumi Kanda, Yutaka Kobayashi, Minoru K. Kurosawa, Hidehiko Yasui, Toshiro Higuchi

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

The mechanical output of piezoelectric vibrators, particularly actuators, is determined by the limit of the vibration velocity. To obtain large vibration velocity, it is important to deposit a thick piezoelectric film. We have succeeded in depositing thick lead zirconate titanate (PZT) films by the hydrothermal method. The thicknesses of the films were 2 μm, 9.8 μm, 20 μm and 30 μm when the reaction times were 2, 5, 10, and 15, respectively. We have also estimated Young's modulus of the PZT films from the resonance frequency of the bimorph vibrators. From the measurement results, Young's modulus of the PZT film was 1.3 × 1010 N/m2. This value corresponded to only 16% of that of bulk PZT. The piezoelectric constants of hydrothermally deposited PZT film were inferior to those of bulk PZT. To obtain much larger constants, it is necessary to obtain larger Young's modulus.

Original languageEnglish
Pages (from-to)5543-5546
Number of pages4
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume40
Issue number9 B
Publication statusPublished - Sep 1 2001
Externally publishedYes

Keywords

  • Actuator
  • Hydrothermal method
  • PZT
  • Piezoelectricity
  • Polycrystal structure
  • Thin film

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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