TY - JOUR
T1 - Estimation of emission efficiency for laser-produced EUV-plasmas
AU - Kawamura, Tohru
AU - Sunahara, Atsushi
AU - Gamada, Kouhei
AU - Fujima, Kazumi
AU - Koike, Fumihiro
AU - Furukawa, Hiroyuki
AU - Nishikawa, Takeshi
AU - Sasaki, Akira
AU - Kagawa, Takashi
AU - More, Richard
AU - Kato, Takako
AU - Murakami, Masakatsu
AU - Zhakhovskii, Vasilli
AU - Tanuma, Hajime
AU - Fujimoto, Takashi
AU - Shimada, Yoshinori
AU - Yamaura, Michiteru
AU - Hashimoto, Kazuhisa
AU - Uchida, Shigeaki
AU - Yamanaka, Chiyoe
AU - Okuno, Tomoharu
AU - Hibino, Takahiro
AU - Ueda, Nobuyoshi
AU - Matsui, Ryoji
AU - Tao, Yezheng
AU - Nakai, Mitsuo
AU - Shigemori, Keisuke
AU - Fujioka, Shinsuke
AU - Nagai, Keiji
AU - Norimatsu, Takayoshi
AU - Nishimura, Hiroaki
AU - Nishihara, Katsunobu
AU - Miyanaga, Noriaki
AU - Izawa, Yasukazu
PY - 2004
Y1 - 2004
N2 - Extreme Ultra Violet (EUV) light source produced by laser irradiation emits not only the desired EUV light of 13 ∼ 14 nm (about 90 eV) but also shorter x-rays. For example, emissions around 4 ∼ 8 nm (about 150 ∼ 300 eV) and 1 ∼ 2.5 nm (about 0.5 ∼ 1.2keV) are experimentally observed from Sn and/or SnO2 plasmas. These emissions are correspond to the N-shell and M-shell transitions, respectively. From the view point of energy balance and efficiency, these transitions should be suppressed. However, they may, to some extent, contribute to provide the 5p and 4f levels with electrons which eventually emit the EUV light and enhance the intensity. To know well about radiative properties and kinematic of the whole plasma, atomic population kinetics and spectral synthesis codes have been developed. These codes can estimate the atomic population with nl-scheme and spectral shapes of the EUV light. Radiation hydrodynamic simulation have been proceeding in this analysis. Finally, the laser intensity dependence of the conversion efficiency calculated by these codes agrees with that of the corresponding experimental results.
AB - Extreme Ultra Violet (EUV) light source produced by laser irradiation emits not only the desired EUV light of 13 ∼ 14 nm (about 90 eV) but also shorter x-rays. For example, emissions around 4 ∼ 8 nm (about 150 ∼ 300 eV) and 1 ∼ 2.5 nm (about 0.5 ∼ 1.2keV) are experimentally observed from Sn and/or SnO2 plasmas. These emissions are correspond to the N-shell and M-shell transitions, respectively. From the view point of energy balance and efficiency, these transitions should be suppressed. However, they may, to some extent, contribute to provide the 5p and 4f levels with electrons which eventually emit the EUV light and enhance the intensity. To know well about radiative properties and kinematic of the whole plasma, atomic population kinetics and spectral synthesis codes have been developed. These codes can estimate the atomic population with nl-scheme and spectral shapes of the EUV light. Radiation hydrodynamic simulation have been proceeding in this analysis. Finally, the laser intensity dependence of the conversion efficiency calculated by these codes agrees with that of the corresponding experimental results.
KW - Code development
KW - Conversion efficiency
KW - EUV
KW - Laser-produced tin-plasmas
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U2 - 10.1117/12.535031
DO - 10.1117/12.535031
M3 - Conference article
AN - SCOPUS:3843121963
SN - 0277-786X
VL - 5374
SP - 918
EP - 925
JO - Proceedings of SPIE - The International Society for Optical Engineering
JF - Proceedings of SPIE - The International Society for Optical Engineering
IS - PART 2
T2 - Emerging Lithographic Technologies VIII
Y2 - 24 February 2004 through 26 February 2004
ER -