Estimation of emission efficiency for laser-produced EUV-plasmas

Tohru Kawamura, Atsushi Sunahara, Kouhei Gamada, Kazumi Fujima, Fumihiro Koike, Hiroyuki Furukawa, Takeshi Nishikawa, Akira Sasaki, Takashi Kagawa, Richard More, Takako Kato, Masakatsu Murakami, Vasilli Zhakhovskii, Hajime Tanuma, Takashi Fujimoto, Yoshinori Shimada, Michiteru Yamaura, Kazuhisa Hashimoto, Shigeaki Uchida, Chiyoe YamanakaTomoharu Okuno, Takahiro Hibino, Nobuyoshi Ueda, Ryoji Matsui, Yezheng Tao, Mitsuo Nakai, Keisuke Shigemori, Shinsuke Fujioka, Keiji Nagai, Takayoshi Norimatsu, Hiroaki Nishimura, Katsunobu Nishihara, Noriaki Miyanaga, Yasukazu Izawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

Extreme Ultra Violet (EUV) light source produced by laser irradiation emits not only the desired EUV light of 13 ∼ 14 nm (about 90 eV) but also shorter x-rays. For example, emissions around 4 ∼ 8 nm (about 150 ∼ 300 eV) and 1 ∼ 2.5 nm (about 0.5 ∼ 1.2keV) are experimentally observed from Sn and/or SnO2 plasmas. These emissions are correspond to the N-shell and M-shell transitions, respectively. From the view point of energy balance and efficiency, these transitions should be suppressed. However, they may, to some extent, contribute to provide the 5p and 4f levels with electrons which eventually emit the EUV light and enhance the intensity. To know well about radiative properties and kinematic of the whole plasma, atomic population kinetics and spectral synthesis codes have been developed. These codes can estimate the atomic population with nl-scheme and spectral shapes of the EUV light. Radiation hydrodynamic simulation have been proceeding in this analysis. Finally, the laser intensity dependence of the conversion efficiency calculated by these codes agrees with that of the corresponding experimental results.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsR.S. Mackay
Pages918-925
Number of pages8
Volume5374
EditionPART 2
DOIs
Publication statusPublished - 2004
EventEmerging Lithographic Technologies VIII - Santa Clara, CA, United States
Duration: Feb 24 2004Feb 26 2004

Other

OtherEmerging Lithographic Technologies VIII
CountryUnited States
CitySanta Clara, CA
Period2/24/042/26/04

Fingerprint

ultraviolet radiation
Plasmas
Lasers
lasers
Laser beam effects
Energy balance
Conversion efficiency
Energy efficiency
Light sources
light sources
Kinematics
kinematics
Hydrodynamics
hydrodynamics
Radiation
X rays
Kinetics
irradiation
Ultraviolet Rays
Electrons

Keywords

  • Code development
  • Conversion efficiency
  • EUV
  • Laser-produced tin-plasmas

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cite this

Kawamura, T., Sunahara, A., Gamada, K., Fujima, K., Koike, F., Furukawa, H., ... Izawa, Y. (2004). Estimation of emission efficiency for laser-produced EUV-plasmas. In R. S. Mackay (Ed.), Proceedings of SPIE - The International Society for Optical Engineering (PART 2 ed., Vol. 5374, pp. 918-925) https://doi.org/10.1117/12.535031

Estimation of emission efficiency for laser-produced EUV-plasmas. / Kawamura, Tohru; Sunahara, Atsushi; Gamada, Kouhei; Fujima, Kazumi; Koike, Fumihiro; Furukawa, Hiroyuki; Nishikawa, Takeshi; Sasaki, Akira; Kagawa, Takashi; More, Richard; Kato, Takako; Murakami, Masakatsu; Zhakhovskii, Vasilli; Tanuma, Hajime; Fujimoto, Takashi; Shimada, Yoshinori; Yamaura, Michiteru; Hashimoto, Kazuhisa; Uchida, Shigeaki; Yamanaka, Chiyoe; Okuno, Tomoharu; Hibino, Takahiro; Ueda, Nobuyoshi; Matsui, Ryoji; Tao, Yezheng; Nakai, Mitsuo; Shigemori, Keisuke; Fujioka, Shinsuke; Nagai, Keiji; Norimatsu, Takayoshi; Nishimura, Hiroaki; Nishihara, Katsunobu; Miyanaga, Noriaki; Izawa, Yasukazu.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / R.S. Mackay. Vol. 5374 PART 2. ed. 2004. p. 918-925.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kawamura, T, Sunahara, A, Gamada, K, Fujima, K, Koike, F, Furukawa, H, Nishikawa, T, Sasaki, A, Kagawa, T, More, R, Kato, T, Murakami, M, Zhakhovskii, V, Tanuma, H, Fujimoto, T, Shimada, Y, Yamaura, M, Hashimoto, K, Uchida, S, Yamanaka, C, Okuno, T, Hibino, T, Ueda, N, Matsui, R, Tao, Y, Nakai, M, Shigemori, K, Fujioka, S, Nagai, K, Norimatsu, T, Nishimura, H, Nishihara, K, Miyanaga, N & Izawa, Y 2004, Estimation of emission efficiency for laser-produced EUV-plasmas. in RS Mackay (ed.), Proceedings of SPIE - The International Society for Optical Engineering. PART 2 edn, vol. 5374, pp. 918-925, Emerging Lithographic Technologies VIII, Santa Clara, CA, United States, 2/24/04. https://doi.org/10.1117/12.535031
Kawamura T, Sunahara A, Gamada K, Fujima K, Koike F, Furukawa H et al. Estimation of emission efficiency for laser-produced EUV-plasmas. In Mackay RS, editor, Proceedings of SPIE - The International Society for Optical Engineering. PART 2 ed. Vol. 5374. 2004. p. 918-925 https://doi.org/10.1117/12.535031
Kawamura, Tohru ; Sunahara, Atsushi ; Gamada, Kouhei ; Fujima, Kazumi ; Koike, Fumihiro ; Furukawa, Hiroyuki ; Nishikawa, Takeshi ; Sasaki, Akira ; Kagawa, Takashi ; More, Richard ; Kato, Takako ; Murakami, Masakatsu ; Zhakhovskii, Vasilli ; Tanuma, Hajime ; Fujimoto, Takashi ; Shimada, Yoshinori ; Yamaura, Michiteru ; Hashimoto, Kazuhisa ; Uchida, Shigeaki ; Yamanaka, Chiyoe ; Okuno, Tomoharu ; Hibino, Takahiro ; Ueda, Nobuyoshi ; Matsui, Ryoji ; Tao, Yezheng ; Nakai, Mitsuo ; Shigemori, Keisuke ; Fujioka, Shinsuke ; Nagai, Keiji ; Norimatsu, Takayoshi ; Nishimura, Hiroaki ; Nishihara, Katsunobu ; Miyanaga, Noriaki ; Izawa, Yasukazu. / Estimation of emission efficiency for laser-produced EUV-plasmas. Proceedings of SPIE - The International Society for Optical Engineering. editor / R.S. Mackay. Vol. 5374 PART 2. ed. 2004. pp. 918-925
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AU - Sunahara, Atsushi

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AU - Koike, Fumihiro

AU - Furukawa, Hiroyuki

AU - Nishikawa, Takeshi

AU - Sasaki, Akira

AU - Kagawa, Takashi

AU - More, Richard

AU - Kato, Takako

AU - Murakami, Masakatsu

AU - Zhakhovskii, Vasilli

AU - Tanuma, Hajime

AU - Fujimoto, Takashi

AU - Shimada, Yoshinori

AU - Yamaura, Michiteru

AU - Hashimoto, Kazuhisa

AU - Uchida, Shigeaki

AU - Yamanaka, Chiyoe

AU - Okuno, Tomoharu

AU - Hibino, Takahiro

AU - Ueda, Nobuyoshi

AU - Matsui, Ryoji

AU - Tao, Yezheng

AU - Nakai, Mitsuo

AU - Shigemori, Keisuke

AU - Fujioka, Shinsuke

AU - Nagai, Keiji

AU - Norimatsu, Takayoshi

AU - Nishimura, Hiroaki

AU - Nishihara, Katsunobu

AU - Miyanaga, Noriaki

AU - Izawa, Yasukazu

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