Enhancement of blue emission from Mg-doped GaN using remote plasma containing atomic hydrogen

Yoichi Kamiura, Masahiro Kaneshiro, Jin Tamura, Takeshi Ishiyama, Yoshifumi Yamashita, Tomotsugu Mitani, Takashi Mukai

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

We have found for the first time that blue emission from Mg-doped GaN was greatly enhanced by remote plasma treatment (RPT) with plasma containing atomic hydrogen, in particular, water vapor plasma, at low temperatures of 300-400°C. The highest enhancing factor was twenty, achieved by water vapor RPT at 400°C for 30 min. The enhanced blue emission was stable up to 500°C, similarly to blue emission from as-grown samples, suggesting the same origin and mechanism. We have confirmed that the emission mechanism is donor-acceptor pair (DAP) recombination, and have concluded that RPT produces a hydrogen-related donor level at Ec - 0.37 eV involved in the DAP emission.

Original languageEnglish
JournalJapanese Journal of Applied Physics, Part 2: Letters
Volume44
Issue number28-32
DOIs
Publication statusPublished - 2005

Fingerprint

Plasmas
Hydrogen
augmentation
hydrogen
Water vapor
water vapor
Temperature

Keywords

  • Blue emission
  • GaN
  • Hydrogen
  • Mg
  • Photoluminescence
  • Remote plasma

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

Enhancement of blue emission from Mg-doped GaN using remote plasma containing atomic hydrogen. / Kamiura, Yoichi; Kaneshiro, Masahiro; Tamura, Jin; Ishiyama, Takeshi; Yamashita, Yoshifumi; Mitani, Tomotsugu; Mukai, Takashi.

In: Japanese Journal of Applied Physics, Part 2: Letters, Vol. 44, No. 28-32, 2005.

Research output: Contribution to journalArticle

Kamiura, Yoichi ; Kaneshiro, Masahiro ; Tamura, Jin ; Ishiyama, Takeshi ; Yamashita, Yoshifumi ; Mitani, Tomotsugu ; Mukai, Takashi. / Enhancement of blue emission from Mg-doped GaN using remote plasma containing atomic hydrogen. In: Japanese Journal of Applied Physics, Part 2: Letters. 2005 ; Vol. 44, No. 28-32.
@article{27bc0f6a0db743ff9ae2cfb946ec3c01,
title = "Enhancement of blue emission from Mg-doped GaN using remote plasma containing atomic hydrogen",
abstract = "We have found for the first time that blue emission from Mg-doped GaN was greatly enhanced by remote plasma treatment (RPT) with plasma containing atomic hydrogen, in particular, water vapor plasma, at low temperatures of 300-400°C. The highest enhancing factor was twenty, achieved by water vapor RPT at 400°C for 30 min. The enhanced blue emission was stable up to 500°C, similarly to blue emission from as-grown samples, suggesting the same origin and mechanism. We have confirmed that the emission mechanism is donor-acceptor pair (DAP) recombination, and have concluded that RPT produces a hydrogen-related donor level at Ec - 0.37 eV involved in the DAP emission.",
keywords = "Blue emission, GaN, Hydrogen, Mg, Photoluminescence, Remote plasma",
author = "Yoichi Kamiura and Masahiro Kaneshiro and Jin Tamura and Takeshi Ishiyama and Yoshifumi Yamashita and Tomotsugu Mitani and Takashi Mukai",
year = "2005",
doi = "10.1143/JJAP.44.L926",
language = "English",
volume = "44",
journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",
issn = "0021-4922",
publisher = "INSTITUTE OF PURE AND APPLIED PHYSICS",
number = "28-32",

}

TY - JOUR

T1 - Enhancement of blue emission from Mg-doped GaN using remote plasma containing atomic hydrogen

AU - Kamiura, Yoichi

AU - Kaneshiro, Masahiro

AU - Tamura, Jin

AU - Ishiyama, Takeshi

AU - Yamashita, Yoshifumi

AU - Mitani, Tomotsugu

AU - Mukai, Takashi

PY - 2005

Y1 - 2005

N2 - We have found for the first time that blue emission from Mg-doped GaN was greatly enhanced by remote plasma treatment (RPT) with plasma containing atomic hydrogen, in particular, water vapor plasma, at low temperatures of 300-400°C. The highest enhancing factor was twenty, achieved by water vapor RPT at 400°C for 30 min. The enhanced blue emission was stable up to 500°C, similarly to blue emission from as-grown samples, suggesting the same origin and mechanism. We have confirmed that the emission mechanism is donor-acceptor pair (DAP) recombination, and have concluded that RPT produces a hydrogen-related donor level at Ec - 0.37 eV involved in the DAP emission.

AB - We have found for the first time that blue emission from Mg-doped GaN was greatly enhanced by remote plasma treatment (RPT) with plasma containing atomic hydrogen, in particular, water vapor plasma, at low temperatures of 300-400°C. The highest enhancing factor was twenty, achieved by water vapor RPT at 400°C for 30 min. The enhanced blue emission was stable up to 500°C, similarly to blue emission from as-grown samples, suggesting the same origin and mechanism. We have confirmed that the emission mechanism is donor-acceptor pair (DAP) recombination, and have concluded that RPT produces a hydrogen-related donor level at Ec - 0.37 eV involved in the DAP emission.

KW - Blue emission

KW - GaN

KW - Hydrogen

KW - Mg

KW - Photoluminescence

KW - Remote plasma

UR - http://www.scopus.com/inward/record.url?scp=30344481943&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=30344481943&partnerID=8YFLogxK

U2 - 10.1143/JJAP.44.L926

DO - 10.1143/JJAP.44.L926

M3 - Article

AN - SCOPUS:30344481943

VL - 44

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

SN - 0021-4922

IS - 28-32

ER -