Enhancement of blue emission from Mg-doped GaN using remote plasma containing atomic hydrogen

Yoichi Kamiura; Masahiro Kaneshiro; Jin Tamura; Takeshi Ishiyama; Yoshifumi Yamashita; Tomotsugu Mitani; Takashi Mukai

doi:10.1143/JJAP.44.L926

Enhancement of blue emission from Mg-doped GaN using remote plasma containing atomic hydrogen

Yoichi Kamiura, Masahiro Kaneshiro, Jin Tamura, Takeshi Ishiyama, Yoshifumi Yamashita, Tomotsugu Mitani, Takashi Mukai

Research output: Contribution to journal › Article › peer-review

14 Citations (Scopus)

Abstract

We have found for the first time that blue emission from Mg-doped GaN was greatly enhanced by remote plasma treatment (RPT) with plasma containing atomic hydrogen, in particular, water vapor plasma, at low temperatures of 300-400°C. The highest enhancing factor was twenty, achieved by water vapor RPT at 400°C for 30 min. The enhanced blue emission was stable up to 500°C, similarly to blue emission from as-grown samples, suggesting the same origin and mechanism. We have confirmed that the emission mechanism is donor-acceptor pair (DAP) recombination, and have concluded that RPT produces a hydrogen-related donor level at E_c - 0.37 eV involved in the DAP emission.

Original language	English
Pages (from-to)	L926-L928
Journal	Japanese Journal of Applied Physics, Part 2: Letters
Volume	44
Issue number	28-32
DOIs	https://doi.org/10.1143/JJAP.44.L926
Publication status	Published - Dec 1 2005

Keywords

Blue emission
GaN
Hydrogen
Mg
Photoluminescence
Remote plasma

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy (miscellaneous)
Physics and Astronomy(all)

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10.1143/JJAP.44.L926

Cite this

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title = "Enhancement of blue emission from Mg-doped GaN using remote plasma containing atomic hydrogen",

abstract = "We have found for the first time that blue emission from Mg-doped GaN was greatly enhanced by remote plasma treatment (RPT) with plasma containing atomic hydrogen, in particular, water vapor plasma, at low temperatures of 300-400°C. The highest enhancing factor was twenty, achieved by water vapor RPT at 400°C for 30 min. The enhanced blue emission was stable up to 500°C, similarly to blue emission from as-grown samples, suggesting the same origin and mechanism. We have confirmed that the emission mechanism is donor-acceptor pair (DAP) recombination, and have concluded that RPT produces a hydrogen-related donor level at Ec - 0.37 eV involved in the DAP emission.",

keywords = "Blue emission, GaN, Hydrogen, Mg, Photoluminescence, Remote plasma",

author = "Yoichi Kamiura and Masahiro Kaneshiro and Jin Tamura and Takeshi Ishiyama and Yoshifumi Yamashita and Tomotsugu Mitani and Takashi Mukai",

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TY - JOUR

T1 - Enhancement of blue emission from Mg-doped GaN using remote plasma containing atomic hydrogen

AU - Kamiura, Yoichi

AU - Kaneshiro, Masahiro

AU - Tamura, Jin

AU - Ishiyama, Takeshi

AU - Yamashita, Yoshifumi

AU - Mitani, Tomotsugu

AU - Mukai, Takashi

PY - 2005/12/1

Y1 - 2005/12/1

N2 - We have found for the first time that blue emission from Mg-doped GaN was greatly enhanced by remote plasma treatment (RPT) with plasma containing atomic hydrogen, in particular, water vapor plasma, at low temperatures of 300-400°C. The highest enhancing factor was twenty, achieved by water vapor RPT at 400°C for 30 min. The enhanced blue emission was stable up to 500°C, similarly to blue emission from as-grown samples, suggesting the same origin and mechanism. We have confirmed that the emission mechanism is donor-acceptor pair (DAP) recombination, and have concluded that RPT produces a hydrogen-related donor level at Ec - 0.37 eV involved in the DAP emission.

AB - We have found for the first time that blue emission from Mg-doped GaN was greatly enhanced by remote plasma treatment (RPT) with plasma containing atomic hydrogen, in particular, water vapor plasma, at low temperatures of 300-400°C. The highest enhancing factor was twenty, achieved by water vapor RPT at 400°C for 30 min. The enhanced blue emission was stable up to 500°C, similarly to blue emission from as-grown samples, suggesting the same origin and mechanism. We have confirmed that the emission mechanism is donor-acceptor pair (DAP) recombination, and have concluded that RPT produces a hydrogen-related donor level at Ec - 0.37 eV involved in the DAP emission.

KW - Blue emission

KW - GaN

KW - Hydrogen

KW - Mg

KW - Photoluminescence

KW - Remote plasma

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JO - Japanese Journal of Applied Physics, Part 2: Letters

JF - Japanese Journal of Applied Physics, Part 2: Letters

IS - 28-32

ER -

Enhancement of blue emission from Mg-doped GaN using remote plasma containing atomic hydrogen

Abstract

Keywords

ASJC Scopus subject areas

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