We have found for the first time that blue emission from Mg-doped GaN was greatly enhanced by remote plasma treatment (RPT) with plasma containing atomic hydrogen, in particular, water vapor plasma, at low temperatures of 300-400°C. The highest enhancing factor was twenty, achieved by water vapor RPT at 400°C for 30 min. The enhanced blue emission was stable up to 500°C, similarly to blue emission from as-grown samples, suggesting the same origin and mechanism. We have confirmed that the emission mechanism is donor-acceptor pair (DAP) recombination, and have concluded that RPT produces a hydrogen-related donor level at Ec - 0.37 eV involved in the DAP emission.
|Journal||Japanese Journal of Applied Physics, Part 2: Letters|
|Publication status||Published - Dec 1 2005|
- Blue emission
- Remote plasma
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
- Physics and Astronomy(all)