Enhancement of blue emission from Mg-doped GaN using remote plasma containing atomic hydrogen

Yoichi Kamiura, Masahiro Kaneshiro, Jin Tamura, Takeshi Ishiyama, Yoshifumi Yamashita, Tomotsugu Mitani, Takashi Mukai

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14 Citations (Scopus)


We have found for the first time that blue emission from Mg-doped GaN was greatly enhanced by remote plasma treatment (RPT) with plasma containing atomic hydrogen, in particular, water vapor plasma, at low temperatures of 300-400°C. The highest enhancing factor was twenty, achieved by water vapor RPT at 400°C for 30 min. The enhanced blue emission was stable up to 500°C, similarly to blue emission from as-grown samples, suggesting the same origin and mechanism. We have confirmed that the emission mechanism is donor-acceptor pair (DAP) recombination, and have concluded that RPT produces a hydrogen-related donor level at Ec - 0.37 eV involved in the DAP emission.

Original languageEnglish
Pages (from-to)L926-L928
JournalJapanese Journal of Applied Physics, Part 2: Letters
Issue number28-32
Publication statusPublished - Dec 1 2005


  • Blue emission
  • GaN
  • Hydrogen
  • Mg
  • Photoluminescence
  • Remote plasma

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy (miscellaneous)
  • Physics and Astronomy(all)


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