Crossed structure of a microfluidic channel and an optical channel waveguide is simple and promising to realize detection of weak fluorescence on an integrated device. Usage of TiO 2 waveguides is suitable for the device because of the high numerical aperture. In this study, we developed fabrication processes for the TiO 2 channel waveguides traversed by microfluidic channels of 0.5-6 μm widths and investigated the effect of the microfluidic channel to the transmittances. The results elucidated that the photointensity at the microfluidic channel was enough to excite fluorophores. Furthermore, we demonstrated detection of fluorescence from 350 quantum dots.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)