Abstract
We observed ESR signals related to Pt and Mn in both n-type and p-type Si. The observed hyperfine structure clearly indicates that the Pt-Mn complex involves one Pt atom and one Mn atom. The anisotropic g-tensor obtained by analyzing the angular dependence of the ESR signals indicates the trigonal (C3v) symmetry with the g-values of g|| = 2.2, g⊥ = 2.1, and the g|| axis along the 〈1 1 1〉 direction. Since it has been known that isolated Pt and Mn atoms occupy substitutional and interstitial sites in Si, respectively, we expect that the Pt-Mn complex consists of a substitutional Pt and an interstitial Mn. In addition, we investigated the dissociation of the complex by thermal treatment at 350-400 °C. The activation energy for the dissociation was determined to be 0.96 eV, which was a little higher than that for the diffusion of interstitial Mn in Si. We assume that interstitial Mn diffuses away, leaving a substitutional Pt atom after the dissociation of the Pt-Mn complex.
| Original language | English |
|---|---|
| Pages (from-to) | 198-201 |
| Number of pages | 4 |
| Journal | Materials Science and Engineering B: Solid-State Materials for Advanced Technology |
| Volume | 159-160 |
| Issue number | C |
| DOIs | |
| Publication status | Published - Mar 15 2009 |
Keywords
- Dissociation
- Electron spin resonance
- Manganese
- Platinum
- Silicon
ASJC Scopus subject areas
- Materials Science(all)
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering