We have investigated a chromium-platinum pair in silicon by electron spin resonance measurement. A new ESR spectrum originating from a chromium-platinum pair has been detected in both n- and p-type silicons diffused with chromium and platinum. The anisotropic g-tensor obtained by analyzing the angular dependence of the ESR spectrum shows a monoclinic (C1h) symmetry with g-values of g1 = 4.67, g2 = 2.99, and g3 = 1.80. The g1 axis is along the (110) direction. The g2 and g 3 axes are perpendicular to the g1 axis, and the g 2 axis is rotated from the (100) direction to the (111) direction at an angle of 20°. The anisotropic character of monoclinic (C1h) symmetry results from the nearest-neighbor configuration consisting of a Pt atom at a substitutional site distorted by the displacement of Pt along the (100) direction and a Cr atom at the nearest-neighbor interstitial site. The ESR measurement under illumination suggests that a chromium-platinum pair forms a donor like electron trap level.
ASJC Scopus subject areas
- Physics and Astronomy(all)