Electrical Discharge Machining of Monocrystalline Silicon

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)1739-1742
Number of pages4
JournalJournal of the Japan Society for Precision Engineering
Volume64
Issue number12
Publication statusPublished - 1998

Cite this

Electrical Discharge Machining of Monocrystalline Silicon. / Okada, Akira.

In: Journal of the Japan Society for Precision Engineering, Vol. 64, No. 12, 1998, p. 1739-1742.

Research output: Contribution to journalArticle

@article{26bfd1f579594326815881f03a763c31,
title = "Electrical Discharge Machining of Monocrystalline Silicon",
author = "Akira Okada",
year = "1998",
language = "English",
volume = "64",
pages = "1739--1742",
journal = "Journal of the Japan Society for Precision Engineering",
number = "12",

}

TY - JOUR

T1 - Electrical Discharge Machining of Monocrystalline Silicon

AU - Okada, Akira

PY - 1998

Y1 - 1998

M3 - Article

VL - 64

SP - 1739

EP - 1742

JO - Journal of the Japan Society for Precision Engineering

JF - Journal of the Japan Society for Precision Engineering

IS - 12

ER -