| Original language | English |
|---|---|
| Pages (from-to) | 1739-1742 |
| Number of pages | 4 |
| Journal | Journal of the Japan Society for Precision Engineering |
| Volume | 64 |
| Issue number | 12 |
| Publication status | Published - 1998 |
Electrical Discharge Machining of Monocrystalline Silicon
Research output: Contribution to journal › Article